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В работе исследованы углеродные пленки на кремниевых подложках. Показано наличие низковольтной эмиссии из углеродных наноструктур. Произведен структурный и элементный анализ приповерхностной области образцов. Выявлено влияние типа легирования подложки на эмиссионные свойства. Оценено соотношение sp2 и sp3 фаз всех образцов в разных областях эмиттеров.
Carbon films deposited on silicon substrates have been studied. Low-voltage emission from the carbon nanostructures was observed. The structural and elemental analysis were carried out to determinate surface composition of the samples. The studies revealed influence of substrate conductivity type onto emission properties. The sp2/sp3 phase ratio was estimated for different areas of all samples.
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