Details

Title: Handbook of silicon based MEMS materials and technologies
Creators: Lindroos Veikko; Tilli Markku; Lehto Ari; Motooka Teruaki
Imprint: Amsterdam [etc.]: Elsevier Inc., William Andrew, 2011
Collection: Электронные книги зарубежных издательств; Общая коллекция
Subjects: Кремний — Электрические свойства; Микроэлектронная аппаратура; Материалы
UDC: 548.28:537(035); 621.382.049.77(035); 620.22(035)
Document type: Other
File type: Other
Language: English
Rights: Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование)
Record key: RU\SPSTU\edoc\52610

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Roll-to-roll vacuum deposition is the technology that applies an even coating to a flexible material that can be held on a roll and provides a much faster and cheaper method of bulk coating than deposition onto single pieces or non-flexible surfaces, such as glass. This technology has been used in industrial-scale applications for some time, including a wide range of metalized packaging (e.g. snack packets). Its potential as a high-speed, scalable process has seen an increasing range of new products emerging that employ this cost-effective technology: solar energy products are moving from rigid panels onto flexible substrates, which are cheaper and more versatile; in a similar way, electronic circuit ‘boards’ can be produced on a flexible polymer, creating a new range of ‘flexible electronics’ products; flexible displays are another area of new technology in vacuum coating, with flexible display panels and light sources emerging. Charles Bishop has written this book to meet the need he identified, as a trainer and consultant to the vacuum coatings industry, for a non-mathematical guide to the technologies, equipment, processes and applications of vacuum deposition. His book is aimed at a wide audience of engineers, technicians and production management. It also provides a guide to the subject for sectors in which vacuum deposition is a novel technology, such as solar energy and flexible electronics.

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