Солтамов, В. А. Интерференционная литография с использованием неорганического фоторезиста на основе халькогенидного стекла [Электронный ресурс] / В. А. Солтамов, Е. Л. Портной. — (Твердотельная электроника). — Электрон. текстовые дан. (1 файл : 68,4 Кб) // XXXVI неделя науки СПбГПУ: материалы Всероссийской межвуз. науч.-техн. конф. студентов и аспирантов, 26 ноября - 1 декабря 2007 г. Санкт-Петербург / Санкт-Петербургский государственный политехнический университет; Совет СПбГПУ по научно-исследовательской работе студентов; [под общ. ред.: А. И. Рудского, Д. Г. Арсеньева, В. В. Глухова]. – Санкт-Петербург. – 2009. – Физико-механический факультет. Физико-технический факультет. Факультет медицинской физики и биоинженерии [Электронный ресурс]. — Загл. с титул. экрана. — Электрон. версия печ. публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Текстовый файл. — Adobe Acrobat Reader 6.0. — <URL:http://elib.spbstu.ru/dl/007977.pdf>.
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Period
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Read
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Print
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Copy
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Open
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Total
|
|
Year 2012
|
Quarter 1
|
January
|
1
|
0
|
1
|
0
|
2
|
|
February
|
1
|
0
|
1
|
0
|
2
|
|
March
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 2
|
April
|
1
|
0
|
2
|
0
|
3
|
|
May
|
1
|
0
|
0
|
0
|
1
|
|
June
|
1
|
0
|
0
|
0
|
1
|
|
Quarter 3
|
July
|
3
|
0
|
1
|
0
|
4
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 4
|
October
|
4
|
0
|
2
|
0
|
6
|
|
November
|
2
|
0
|
2
|
0
|
4
|
|
December
|
0
|
0
|
7
|
0
|
7
|
|
Year 2013
|
Quarter 1
|
January
|
2
|
0
|
3
|
0
|
5
|
|
February
|
1
|
0
|
1
|
0
|
2
|
|
March
|
0
|
0
|
2
|
0
|
2
|
|
Quarter 2
|
April
|
4
|
0
|
1
|
0
|
5
|
|
May
|
5
|
0
|
0
|
0
|
5
|
|
June
|
3
|
0
|
1
|
0
|
4
|
|
Quarter 3
|
July
|
8
|
0
|
0
|
0
|
8
|
|
August
|
8
|
0
|
2
|
0
|
10
|
|
September
|
7
|
0
|
0
|
0
|
7
|
|
Quarter 4
|
October
|
11
|
0
|
2
|
0
|
13
|
|
November
|
11
|
0
|
0
|
0
|
11
|
|
December
|
5
|
0
|
1
|
0
|
6
|
|
Year 2014
|
Quarter 1
|
January
|
13
|
0
|
1
|
0
|
14
|
|
February
|
3
|
0
|
0
|
0
|
3
|
|
March
|
7
|
0
|
3
|
0
|
10
|
|
Quarter 2
|
April
|
3
|
0
|
0
|
0
|
3
|
|
May
|
10
|
0
|
5
|
0
|
15
|
|
June
|
6
|
0
|
1
|
0
|
7
|
|
Quarter 3
|
July
|
1
|
0
|
3
|
0
|
4
|
|
August
|
1
|
0
|
1
|
0
|
2
|
|
September
|
3
|
0
|
1
|
0
|
4
|
|
Quarter 4
|
October
|
5
|
0
|
3
|
0
|
8
|
|
November
|
5
|
0
|
1
|
0
|
6
|
|
December
|
7
|
0
|
2
|
0
|
9
|
|
Year 2015
|
Quarter 1
|
January
|
5
|
0
|
1
|
0
|
6
|
|
February
|
3
|
0
|
0
|
0
|
3
|
|
March
|
7
|
0
|
0
|
0
|
7
|
|
Quarter 2
|
April
|
3
|
0
|
2
|
0
|
5
|
|
May
|
9
|
0
|
2
|
0
|
11
|
|
June
|
12
|
0
|
10
|
0
|
22
|
|
Quarter 3
|
July
|
6
|
0
|
4
|
0
|
10
|
|
August
|
4
|
0
|
1
|
0
|
5
|
|
September
|
8
|
0
|
1
|
0
|
9
|
|
Quarter 4
|
October
|
5
|
0
|
4
|
0
|
9
|
|
November
|
3
|
0
|
4
|
0
|
7
|
|
December
|
4
|
0
|
1
|
0
|
5
|
|
Year 2016
|
Quarter 1
|
January
|
6
|
0
|
0
|
0
|
6
|
|
February
|
3
|
0
|
12
|
0
|
15
|
|
March
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 2
|
April
|
8
|
0
|
6
|
0
|
14
|
|
May
|
6
|
0
|
3
|
0
|
9
|
|
June
|
8
|
0
|
4
|
0
|
12
|
|
Quarter 3
|
July
|
11
|
0
|
2
|
0
|
13
|
|
August
|
8
|
0
|
1
|
0
|
9
|
|
September
|
10
|
0
|
2
|
0
|
12
|
|
Quarter 4
|
October
|
10
|
0
|
5
|
0
|
15
|
|
November
|
1
|
0
|
0
|
0
|
1
|
|
December
|
5
|
0
|
3
|
0
|
8
|
|
Year 2017
|
Quarter 1
|
January
|
4
|
0
|
0
|
0
|
4
|
|
February
|
1
|
0
|
0
|
0
|
1
|
|
March
|
2
|
0
|
5
|
0
|
7
|
|
Quarter 2
|
April
|
2
|
0
|
2
|
0
|
4
|
|
May
|
6
|
0
|
5
|
0
|
11
|
|
June
|
1
|
0
|
1
|
0
|
2
|
|
Quarter 3
|
July
|
5
|
0
|
3
|
0
|
8
|
|
August
|
4
|
0
|
2
|
0
|
6
|
|
September
|
3
|
0
|
4
|
0
|
7
|
|
Quarter 4
|
October
|
9
|
0
|
6
|
0
|
15
|
|
November
|
1
|
0
|
5
|
0
|
6
|
|
December
|
3
|
0
|
5
|
0
|
8
|
|
Year 2018
|
Quarter 1
|
January
|
2
|
0
|
5
|
0
|
7
|
|
February
|
6
|
0
|
3
|
0
|
9
|
|
March
|
2
|
0
|
5
|
0
|
7
|
|
Quarter 2
|
April
|
2
|
0
|
1
|
0
|
3
|
|
May
|
4
|
0
|
2
|
0
|
6
|
|
June
|
2
|
0
|
4
|
0
|
6
|
|
Quarter 3
|
July
|
3
|
0
|
6
|
0
|
9
|
|
August
|
12
|
0
|
12
|
0
|
24
|
|
September
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 4
|
October
|
2
|
0
|
3
|
0
|
5
|
|
November
|
0
|
0
|
2
|
0
|
2
|
|
December
|
2
|
0
|
1
|
0
|
3
|
|
Year 2019
|
Quarter 1
|
January
|
2
|
0
|
0
|
0
|
2
|
|
February
|
1
|
0
|
4
|
0
|
5
|
|
March
|
2
|
0
|
5
|
0
|
7
|
|
Quarter 2
|
April
|
0
|
0
|
1
|
0
|
1
|
|
May
|
3
|
0
|
0
|
0
|
3
|
|
June
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 3
|
July
|
2
|
0
|
5
|
0
|
7
|
|
August
|
1
|
0
|
2
|
0
|
3
|
|
September
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 4
|
October
|
0
|
0
|
2
|
0
|
2
|
|
November
|
0
|
0
|
1
|
0
|
1
|
|
December
|
1
|
0
|
2
|
0
|
3
|
|
Year 2020
|
Quarter 1
|
January
|
0
|
0
|
4
|
0
|
4
|
|
February
|
2
|
0
|
14
|
0
|
16
|
|
March
|
5
|
0
|
17
|
0
|
22
|
|
Quarter 2
|
April
|
2
|
0
|
0
|
0
|
2
|
|
May
|
2
|
0
|
0
|
0
|
2
|
|
June
|
3
|
0
|
0
|
0
|
3
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
2
|
0
|
0
|
0
|
2
|
|
September
|
4
|
0
|
0
|
0
|
4
|
|
Quarter 4
|
October
|
2
|
0
|
0
|
0
|
2
|
|
November
|
4
|
0
|
7
|
0
|
11
|
|
December
|
4
|
0
|
6
|
0
|
10
|
|
Year 2021
|
Quarter 1
|
January
|
9
|
0
|
1
|
0
|
10
|
|
February
|
1
|
0
|
4
|
0
|
5
|
|
March
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 2
|
April
|
2
|
0
|
3
|
0
|
5
|
|
May
|
5
|
0
|
3
|
0
|
8
|
|
June
|
4
|
0
|
6
|
0
|
10
|
|
Quarter 3
|
July
|
2
|
0
|
2
|
0
|
4
|
|
August
|
4
|
0
|
4
|
0
|
8
|
|
September
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 4
|
October
|
2
|
0
|
2
|
0
|
4
|
|
November
|
2
|
0
|
0
|
0
|
2
|
|
December
|
6
|
0
|
0
|
0
|
6
|
|
Year 2022
|
Quarter 1
|
January
|
1
|
0
|
5
|
0
|
6
|
|
February
|
4
|
0
|
1
|
0
|
5
|
|
March
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 2
|
April
|
1
|
0
|
0
|
0
|
1
|
|
May
|
1
|
0
|
3
|
0
|
4
|
|
June
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 3
|
July
|
3
|
0
|
0
|
0
|
3
|
|
August
|
3
|
0
|
2
|
0
|
5
|
|
September
|
4
|
0
|
2
|
0
|
6
|
|
Quarter 4
|
October
|
2
|
0
|
0
|
0
|
2
|
|
November
|
4
|
0
|
2
|
0
|
6
|
|
December
|
9
|
0
|
7
|
0
|
16
|
|
Year 2023
|
Quarter 1
|
January
|
2
|
0
|
3
|
0
|
5
|
|
February
|
0
|
0
|
4
|
0
|
4
|
|
March
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 2
|
April
|
2
|
0
|
1
|
0
|
3
|
|
May
|
2
|
0
|
2
|
0
|
4
|
|
June
|
1
|
0
|
2
|
0
|
3
|
|
Quarter 3
|
July
|
1
|
0
|
3
|
0
|
4
|
|
August
|
1
|
0
|
2
|
0
|
3
|
|
September
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 4
|
October
|
5
|
0
|
3
|
0
|
8
|
|
November
|
4
|
0
|
8
|
0
|
12
|
|
December
|
1
|
0
|
1
|
0
|
2
|
|
Year 2024
|
Quarter 1
|
January
|
1
|
0
|
2
|
0
|
3
|
|
February
|
1
|
0
|
7
|
0
|
8
|
|
March
|
2
|
0
|
7
|
0
|
9
|
|
Quarter 2
|
April
|
4
|
0
|
7
|
0
|
11
|
|
Total
|
521
|
0
|
391
|
0
|
912
|
