Громов, Павел Юрьевич. Изучение свойств наноструктурированных пленок кремния, полученных методом плазмо-химического осаждения [Электронный ресурс]: магистерская диссертация / П.Ю. Громов; Санкт-Петербургский государственный политехнический университет, Институт физики, нанотехнологий и телекоммуникаций, Кафедра физики полупроводников и наноэлектроники. — Электрон. текстовые дан. (1 файл : 4,67 Мб). — Санкт-Петербург, 2014. — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Текстовый файл. — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/2/4179.pdf>.
Period
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Read
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Print
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Copy
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Open
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Total
|
Year 2014
|
Quarter 2
|
June
|
3
|
0
|
1
|
0
|
4
|
Quarter 3
|
July
|
12
|
0
|
9
|
0
|
21
|
August
|
4
|
0
|
2
|
0
|
6
|
September
|
6
|
0
|
0
|
0
|
6
|
Quarter 4
|
October
|
4
|
0
|
3
|
0
|
7
|
November
|
6
|
0
|
5
|
0
|
11
|
December
|
7
|
0
|
0
|
0
|
7
|
Year 2015
|
Quarter 1
|
January
|
5
|
0
|
2
|
0
|
7
|
February
|
3
|
0
|
2
|
0
|
5
|
March
|
4
|
0
|
2
|
0
|
6
|
Quarter 2
|
April
|
6
|
0
|
1
|
0
|
7
|
May
|
7
|
0
|
2
|
0
|
9
|
June
|
10
|
0
|
1
|
0
|
11
|
Quarter 3
|
July
|
3
|
0
|
1
|
0
|
4
|
August
|
1
|
0
|
1
|
0
|
2
|
September
|
4
|
0
|
5
|
0
|
9
|
Quarter 4
|
October
|
3
|
0
|
8
|
0
|
11
|
November
|
5
|
0
|
2
|
0
|
7
|
December
|
1
|
0
|
0
|
0
|
1
|
Year 2016
|
Quarter 1
|
January
|
5
|
0
|
3
|
0
|
8
|
February
|
5
|
0
|
1
|
0
|
6
|
March
|
3
|
0
|
0
|
0
|
3
|
Quarter 2
|
April
|
5
|
0
|
3
|
0
|
8
|
May
|
1
|
0
|
0
|
0
|
1
|
June
|
5
|
0
|
2
|
0
|
7
|
Quarter 3
|
July
|
2
|
0
|
0
|
0
|
2
|
August
|
2
|
0
|
0
|
0
|
2
|
September
|
1
|
0
|
0
|
0
|
1
|
Quarter 4
|
October
|
3
|
0
|
2
|
0
|
5
|
November
|
3
|
0
|
1
|
0
|
4
|
December
|
5
|
0
|
1
|
0
|
6
|
Year 2017
|
Quarter 1
|
January
|
1
|
0
|
0
|
0
|
1
|
February
|
0
|
0
|
0
|
0
|
0
|
March
|
4
|
0
|
2
|
0
|
6
|
Quarter 2
|
April
|
4
|
0
|
5
|
0
|
9
|
May
|
6
|
0
|
11
|
0
|
17
|
June
|
1
|
0
|
26
|
0
|
27
|
Quarter 3
|
July
|
8
|
0
|
13
|
0
|
21
|
August
|
1
|
0
|
16
|
0
|
17
|
September
|
3
|
0
|
12
|
0
|
15
|
Quarter 4
|
October
|
5
|
0
|
16
|
0
|
21
|
November
|
1
|
0
|
11
|
0
|
12
|
December
|
7
|
0
|
20
|
0
|
27
|
Year 2018
|
Quarter 1
|
January
|
2
|
0
|
33
|
0
|
35
|
February
|
2
|
0
|
11
|
0
|
13
|
March
|
3
|
0
|
18
|
0
|
21
|
Quarter 2
|
April
|
3
|
0
|
10
|
0
|
13
|
May
|
0
|
0
|
28
|
0
|
28
|
June
|
5
|
0
|
47
|
0
|
52
|
Quarter 3
|
July
|
1
|
0
|
10
|
0
|
11
|
August
|
5
|
0
|
19
|
0
|
24
|
September
|
1
|
0
|
19
|
0
|
20
|
Quarter 4
|
October
|
4
|
0
|
22
|
0
|
26
|
November
|
2
|
0
|
30
|
0
|
32
|
December
|
1
|
0
|
15
|
0
|
16
|
Year 2019
|
Quarter 1
|
January
|
3
|
0
|
18
|
0
|
21
|
February
|
2
|
0
|
20
|
0
|
22
|
March
|
0
|
0
|
26
|
0
|
26
|
Quarter 2
|
April
|
2
|
0
|
23
|
0
|
25
|
May
|
2
|
0
|
37
|
0
|
39
|
June
|
2
|
0
|
16
|
0
|
18
|
Quarter 3
|
July
|
2
|
0
|
12
|
0
|
14
|
August
|
0
|
0
|
14
|
0
|
14
|
September
|
3
|
0
|
15
|
0
|
18
|
Quarter 4
|
October
|
1
|
0
|
34
|
0
|
35
|
November
|
3
|
0
|
82
|
0
|
85
|
December
|
2
|
0
|
64
|
0
|
66
|
Year 2020
|
Quarter 1
|
January
|
9
|
0
|
20
|
0
|
29
|
February
|
3
|
0
|
18
|
0
|
21
|
March
|
6
|
0
|
10
|
0
|
16
|
Quarter 2
|
April
|
4
|
0
|
0
|
0
|
4
|
May
|
0
|
0
|
0
|
0
|
0
|
June
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
August
|
0
|
0
|
0
|
0
|
0
|
September
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
October
|
1
|
0
|
2
|
0
|
3
|
November
|
0
|
0
|
0
|
0
|
0
|
December
|
0
|
0
|
0
|
0
|
0
|
2021
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
February
|
0
|
0
|
0
|
0
|
0
|
March
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
May
|
0
|
0
|
0
|
0
|
0
|
June
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
August
|
0
|
0
|
0
|
0
|
0
|
September
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
November
|
0
|
0
|
0
|
0
|
0
|
December
|
0
|
0
|
0
|
0
|
0
|
Year 2022
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
February
|
0
|
0
|
0
|
0
|
0
|
March
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
April
|
0
|
0
|
1
|
0
|
1
|
May
|
0
|
0
|
0
|
0
|
0
|
June
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
August
|
0
|
0
|
0
|
0
|
0
|
September
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
November
|
0
|
0
|
0
|
0
|
0
|
December
|
0
|
0
|
0
|
0
|
0
|
2023
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
February
|
0
|
0
|
0
|
0
|
0
|
March
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
May
|
0
|
0
|
0
|
0
|
0
|
June
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
August
|
0
|
0
|
0
|
0
|
0
|
September
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
November
|
0
|
0
|
0
|
0
|
0
|
December
|
0
|
0
|
0
|
0
|
0
|
Year 2024
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
February
|
0
|
0
|
0
|
0
|
0
|
March
|
1
|
0
|
1
|
0
|
2
|
Quarter 2
|
April
|
1
|
0
|
0
|
0
|
1
|
Total
|
251
|
0
|
867
|
0
|
1,118
|