Кобелев, Антон Андреевич. Анализ потоков ионов из ВЧ газового разряда, используемого для процессов модификации поверхности твердого тела: специальность 01.04.04 "Физическая электроника": автореферат диссертации на соискание ученой степени кандидата физико-математических наук / Кобелев Антон Андреевич; научный руководитель А. С. Смирнов ; Санкт-Петербургский политехнический университет Петра Великого. — Санкт-Петербург, 2019. — 1 файл (1513 Кб). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/2/r19-50.pdf>. — DOI 10.18720/SPBPU/2/r19-50. — Текст: электронный
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Period
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Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2019
|
Quarter 4
|
October
|
6
|
0
|
4
|
0
|
10
|
|
November
|
3
|
0
|
0
|
0
|
3
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2020
|
Quarter 1
|
January
|
0
|
0
|
1
|
0
|
1
|
|
February
|
0
|
0
|
3
|
0
|
3
|
|
March
|
5
|
0
|
6
|
0
|
11
|
|
Quarter 2
|
April
|
7
|
0
|
0
|
0
|
7
|
|
May
|
4
|
0
|
1
|
0
|
5
|
|
June
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 3
|
July
|
1
|
0
|
0
|
0
|
1
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
3
|
0
|
0
|
0
|
3
|
|
Quarter 4
|
October
|
2
|
0
|
1
|
0
|
3
|
|
November
|
4
|
0
|
4
|
0
|
8
|
|
December
|
0
|
0
|
4
|
0
|
4
|
|
Year 2021
|
Quarter 1
|
January
|
1
|
0
|
6
|
0
|
7
|
|
February
|
3
|
0
|
4
|
0
|
7
|
|
March
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 2
|
April
|
1
|
0
|
1
|
0
|
2
|
|
May
|
0
|
0
|
1
|
0
|
1
|
|
June
|
8
|
0
|
2
|
0
|
10
|
|
Quarter 3
|
July
|
3
|
0
|
4
|
0
|
7
|
|
August
|
2
|
0
|
4
|
0
|
6
|
|
September
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 4
|
October
|
6
|
0
|
7
|
0
|
13
|
|
November
|
2
|
0
|
5
|
0
|
7
|
|
December
|
0
|
0
|
3
|
0
|
3
|
|
Year 2022
|
Quarter 1
|
January
|
1
|
0
|
5
|
0
|
6
|
|
February
|
1
|
0
|
7
|
0
|
8
|
|
March
|
2
|
0
|
5
|
0
|
7
|
|
Quarter 2
|
April
|
3
|
0
|
4
|
0
|
7
|
|
May
|
2
|
0
|
6
|
0
|
8
|
|
June
|
5
|
0
|
7
|
0
|
12
|
|
Quarter 3
|
July
|
3
|
0
|
2
|
0
|
5
|
|
August
|
5
|
0
|
1
|
0
|
6
|
|
September
|
2
|
0
|
5
|
0
|
7
|
|
Quarter 4
|
October
|
3
|
0
|
4
|
0
|
7
|
|
November
|
9
|
0
|
3
|
0
|
12
|
|
December
|
7
|
0
|
10
|
0
|
17
|
|
Year 2023
|
Quarter 1
|
January
|
4
|
0
|
20
|
0
|
24
|
|
February
|
4
|
0
|
5
|
0
|
9
|
|
March
|
3
|
0
|
6
|
0
|
9
|
|
Quarter 2
|
April
|
0
|
0
|
8
|
0
|
8
|
|
May
|
1
|
0
|
3
|
0
|
4
|
|
June
|
3
|
0
|
7
|
0
|
10
|
|
Quarter 3
|
July
|
1
|
0
|
4
|
0
|
5
|
|
August
|
3
|
0
|
6
|
0
|
9
|
|
September
|
0
|
0
|
7
|
0
|
7
|
|
Quarter 4
|
October
|
3
|
0
|
9
|
0
|
12
|
|
November
|
2
|
0
|
12
|
0
|
14
|
|
December
|
1
|
0
|
4
|
0
|
5
|
|
Year 2024
|
Quarter 1
|
January
|
1
|
0
|
5
|
0
|
6
|
|
February
|
0
|
0
|
6
|
0
|
6
|
|
March
|
0
|
0
|
11
|
0
|
11
|
|
Quarter 2
|
April
|
1
|
0
|
11
|
0
|
12
|
|
Total
|
138
|
0
|
248
|
0
|
386
|
