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В данной работы изложены основные особенности плазмоактивируемого химического осаждения из газовой фазы наночастиц. Экспериментально получены наночастицы различных размеров в емкостно-связанной плазме высокочастотного разряда атмосферного давления в постоянном и импульсном режимах. Проведен элементный анализ полученных наночастиц и анализ распределения их по размерам.
This paper presents the main features of plasma-enhanced chemical vapor deposition of nanoparticles from the gas phase. Nanoparticles of various sizes were experimentally obtained in a capacitively coupled plasma of a high-frequency discharge of atmospheric pressure in constant and pulsed modes. An elemental analysis of the obtained nanoparticles and the analysis of their size distribution were carried out.
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