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В работе были получены каталитические железные пленки для дальнейшего плазмохимического осаждения углеродных нанотрубок на кремниевых подложках, при постоянном токе. Изучены эмиссионные характеристики выращенных трубок, а также проведен анализ влияния толщины катализатора на рост углеродных нанотрубок.
In this work, catalytic iron films were obtained for further plasma-chemical deposition of carbon nanotubes on silicon substrates at a direct current. The emission characteristics of the grown tubes have been studied, and the effect of the catalyst thickness on the growth of carbon nanotubes has been analyzed.
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