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Annotation
Данная работа посвящена выявлению и исследованию ростовых дислокаций α- и β- полиморфов оксида галлия. Задачи, которые ставились в ходе исследования: ознакомление с особенностями роста α- и β- полиморфов оксида галлия; избирательное травление поверхности слоев и кристаллов оксида галлия и выявление ямок травления, обусловленных дислокациями; исследование фигур травления и их плотности в кристаллах и слоях оксида галлия.
The present paper is dedicated to the identification and study of growth dislocations of α - and β - polymorphs of gallium oxide. The author outlines the following tasks: Introduction to the growth features of agallium oxide α - and β - polymorphs; Selective wetching of the surface of gallium oxide layers and crystals and identification of etching pits caused by dislocation; study of etching patterns and their density in gallium oxide crystals and layer.
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