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Advanced Mechatronics and MEMS Devices

  • Book
  • © 2013

Overview

Editors:
  1. Dan Zhang

    1. , Faculty of Engineering and Applied Scien, University of Ontario Institute of Techn, Oshawa, Canada

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  • Covers the fundamentals of advanced mechatronics and MEMS devices while also presenting new state-of-the-art methodology and technology used in the application of these devices
  • Presents numerous applications of MEMS technology in robotics, using novel applications of micro-robots based on MEMS design and implementation
  • Uses an extensive number of case studies

Part of the book series: Microsystems (MICT, volume 23)

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About this book

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.

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Table of contents (12 chapters)

  1. Front Matter

    Pages i-xi
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  2. Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor

    • Jörg Eichholz, Torgny Brogårdh
    Pages 1-23

  3. Piezoelectrically Actuated Robotic End-Effector with Strain Amplification Mechanisms

    • Jun Ueda
    Pages 25-52

  4. Autocalibration of MEMS Accelerometers

    • Iuri Frosio, Federico Pedersini, N. Alberto Borghese
    Pages 53-88

  5. Miniaturization of Micromanipulation Tools

    • Brandon K. Chen, Yu Sun
    Pages 89-98

  6. Digital Microrobotics Using MEMS Technology

    • Yassine Haddab, Vincent Chalvet, Qiao Chen, Philippe Lutz
    Pages 99-116

  7. Flexure-Based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches

    • Wenjie Chen, Guilin Yang, Wei Lin
    Pages 117-140

  8. Micro-Tactile Sensors for In Vivo Measurements of Elasticity

    • Peng Peng, Rajesh Rajamani
    Pages 141-163

  9. Devices and Techniques for Contact Microgripping

    • Claudia Pagano, Irene Fassi
    Pages 165-178

  10. A Wall-Climbing Robot with Biomimetic Adhesive Pedrail

    • Xuan Wu, Dapeng Wang, Aiwu Zhao, Da Li, Tao Mei
    Pages 179-191

  11. Development of Bioinspired Artificial Sensory Cilia

    • Weiting Liu, Fei Li, Xin Fu, Cesare Stefanini, Paolo Dario
    Pages 193-206

  12. Jumping Like an Insect: From Biomimetic Inspiration to a Jumping Minirobot Design

    • Weiting Liu, Fei Li, Xin Fu, Cesare Stefanini, Gabriella Bonsignori, Umberto Scarfogliero et al.
    Pages 207-221

  13. Modeling and H ∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System

    • Yang Lin, Yang Shi, Richard Burton
    Pages 223-239

  14. Back Matter

    Pages 241-249
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Editors and Affiliations

  • , Faculty of Engineering and Applied Scien, University of Ontario Institute of Techn, Oshawa, Canada

    Dan Zhang

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