Моор, Светлана Юрьевна. Плазмохимическое травление кремния в емкостно-связанном ВЧ разряде [Электронный ресурс]: магистерская диссертация: 22.04.01 / С. Ю. Моор; Санкт-Петербургский политехнический университет Петра Великого, Институт металлургии, машиностроения и транспорта ; науч. рук. А. И. Демидов. — Электрон. текстовые дан. (1 файл : 2,87 Мб). — Санкт-Петербург, 2017. — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/2/v17-3425.pdf>. — <URL:http://doi.org/10.18720/SPBPU/2/v17-3425>.
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Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2017
|
Quarter 4
|
October
|
12
|
0
|
11
|
0
|
23
|
|
November
|
0
|
0
|
14
|
0
|
14
|
|
December
|
3
|
0
|
10
|
0
|
13
|
|
Year 2018
|
Quarter 1
|
January
|
1
|
0
|
12
|
0
|
13
|
|
February
|
0
|
0
|
23
|
0
|
23
|
|
March
|
3
|
0
|
8
|
0
|
11
|
|
Quarter 2
|
April
|
6
|
0
|
9
|
0
|
15
|
|
May
|
5
|
0
|
34
|
0
|
39
|
|
June
|
7
|
0
|
38
|
0
|
45
|
|
Quarter 3
|
July
|
5
|
0
|
16
|
0
|
21
|
|
August
|
5
|
0
|
22
|
0
|
27
|
|
September
|
4
|
0
|
22
|
0
|
26
|
|
Quarter 4
|
October
|
3
|
0
|
32
|
0
|
35
|
|
November
|
4
|
0
|
20
|
0
|
24
|
|
December
|
2
|
0
|
11
|
0
|
13
|
|
Year 2019
|
Quarter 1
|
January
|
1
|
0
|
14
|
0
|
15
|
|
February
|
0
|
0
|
8
|
0
|
8
|
|
March
|
4
|
0
|
17
|
0
|
21
|
|
Quarter 2
|
April
|
0
|
0
|
17
|
0
|
17
|
|
May
|
1
|
0
|
23
|
0
|
24
|
|
June
|
1
|
0
|
13
|
0
|
14
|
|
Quarter 3
|
July
|
1
|
0
|
7
|
0
|
8
|
|
August
|
0
|
0
|
8
|
0
|
8
|
|
September
|
2
|
0
|
29
|
0
|
31
|
|
Quarter 4
|
October
|
1
|
0
|
22
|
0
|
23
|
|
November
|
3
|
0
|
46
|
0
|
49
|
|
December
|
0
|
0
|
67
|
0
|
67
|
|
Year 2020
|
Quarter 1
|
January
|
1
|
0
|
24
|
0
|
25
|
|
February
|
1
|
0
|
25
|
0
|
26
|
|
March
|
3
|
0
|
11
|
0
|
14
|
|
Quarter 2
|
April
|
2
|
0
|
2
|
0
|
4
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
1
|
0
|
1
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2021
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
1
|
0
|
0
|
0
|
1
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
1
|
0
|
4
|
0
|
5
|
|
June
|
1
|
0
|
0
|
0
|
1
|
|
Quarter 3
|
July
|
1
|
0
|
0
|
0
|
1
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2022
|
Quarter 1
|
January
|
1
|
0
|
2
|
0
|
3
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
2
|
0
|
2
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
86
|
0
|
624
|
0
|
710
|
