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В данной работе рассмотрены автоэмиссионные характеристики различных тонкопленочных структур на кремниевых подложках различных типов. Структуры создавались из таких металлов, как Mo, Zr, W, Ni, Ti. При разных скоростях напыления и температуре подложки. Проанализированы эмиссионные характеристики, зависимости тока от времени, выявлена оптимальная топография поверхности.
In this paper, the field emission characteristics of various thin-film structures on silicon substrates of various types were considered. The structures were created from metals such as Mo, Zr, W, Ni, Ti. At different deposition rates and substrate temperatures. The emission characteristics was analyzed, the optimal surface topography was revealed.
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