Рамушина, Е.М. Реактивное ионное травление III-нитридов [Электронный ресурс] / Е.М. Рамушина, С.А. Гуревич. — (Секция "Физика твердого тела"). — Электрон. текстовые дан. (1 файл : 73,7 Кб) // Материалы...27 ноября - 2 декабря 2000 г. [Электронный ресурс] / Санкт-Петербургский государственный технический университет. Межвузовская научная конференция, Неделя науки (29; 2000; Санкт-Петербург); Совет СПбГТУ по научно-исследовательской работе студентов; Под общ. ред. В.В. Глухова. – СПб. – 2002. – Радиофизический и физико-технический факультеты [Электронный ресурс]. — Загл. с титул. экрана. — Электрон. версия печ. публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Текстовый файл. — Adobe Acrobat Reader 4.0. — <URL:http://elib.spbstu.ru/dl/000654.pdf>.
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Period
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Read
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Print
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Copy
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Open
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Total
|
|
Year 2012
|
Quarter 1
|
January
|
2
|
0
|
2
|
0
|
4
|
|
February
|
1
|
0
|
1
|
0
|
2
|
|
March
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 2
|
April
|
4
|
0
|
1
|
0
|
5
|
|
May
|
2
|
0
|
1
|
0
|
3
|
|
June
|
0
|
0
|
2
|
0
|
2
|
|
Quarter 3
|
July
|
2
|
0
|
2
|
0
|
4
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
3
|
0
|
3
|
0
|
6
|
|
Quarter 4
|
October
|
3
|
0
|
2
|
0
|
5
|
|
November
|
3
|
0
|
4
|
0
|
7
|
|
December
|
3
|
0
|
5
|
0
|
8
|
|
Year 2013
|
Quarter 1
|
January
|
2
|
0
|
5
|
0
|
7
|
|
February
|
3
|
0
|
5
|
0
|
8
|
|
March
|
0
|
0
|
4
|
0
|
4
|
|
Quarter 2
|
April
|
4
|
0
|
1
|
0
|
5
|
|
May
|
1
|
0
|
2
|
0
|
3
|
|
June
|
6
|
0
|
2
|
0
|
8
|
|
Quarter 3
|
July
|
8
|
0
|
2
|
0
|
10
|
|
August
|
8
|
0
|
5
|
0
|
13
|
|
September
|
7
|
0
|
0
|
0
|
7
|
|
Quarter 4
|
October
|
4
|
0
|
2
|
0
|
6
|
|
November
|
1
|
0
|
1
|
0
|
2
|
|
December
|
7
|
0
|
3
|
0
|
10
|
|
Year 2014
|
Quarter 1
|
January
|
5
|
0
|
4
|
0
|
9
|
|
February
|
10
|
0
|
8
|
0
|
18
|
|
March
|
4
|
0
|
2
|
0
|
6
|
|
Quarter 2
|
April
|
6
|
0
|
0
|
0
|
6
|
|
May
|
8
|
0
|
3
|
0
|
11
|
|
June
|
10
|
0
|
4
|
0
|
14
|
|
Quarter 3
|
July
|
12
|
0
|
1
|
0
|
13
|
|
August
|
5
|
0
|
0
|
0
|
5
|
|
September
|
4
|
0
|
0
|
0
|
4
|
|
Quarter 4
|
October
|
8
|
0
|
1
|
0
|
9
|
|
November
|
1
|
0
|
0
|
0
|
1
|
|
December
|
10
|
0
|
1
|
0
|
11
|
|
Year 2015
|
Quarter 1
|
January
|
7
|
0
|
2
|
0
|
9
|
|
February
|
3
|
0
|
0
|
0
|
3
|
|
March
|
4
|
0
|
5
|
0
|
9
|
|
Quarter 2
|
April
|
9
|
0
|
1
|
0
|
10
|
|
May
|
8
|
0
|
3
|
0
|
11
|
|
June
|
6
|
0
|
3
|
0
|
9
|
|
Quarter 3
|
July
|
8
|
0
|
4
|
0
|
12
|
|
August
|
4
|
0
|
2
|
0
|
6
|
|
September
|
8
|
0
|
6
|
0
|
14
|
|
Quarter 4
|
October
|
4
|
0
|
4
|
0
|
8
|
|
November
|
7
|
0
|
6
|
0
|
13
|
|
December
|
3
|
0
|
2
|
0
|
5
|
|
Year 2016
|
Quarter 1
|
January
|
2
|
0
|
6
|
0
|
8
|
|
February
|
6
|
0
|
6
|
0
|
12
|
|
March
|
1
|
0
|
2
|
0
|
3
|
|
Quarter 2
|
April
|
5
|
0
|
1
|
0
|
6
|
|
May
|
1
|
0
|
0
|
0
|
1
|
|
June
|
6
|
0
|
4
|
0
|
10
|
|
Quarter 3
|
July
|
1
|
0
|
0
|
0
|
1
|
|
August
|
2
|
0
|
4
|
0
|
6
|
|
September
|
6
|
0
|
8
|
0
|
14
|
|
Quarter 4
|
October
|
0
|
0
|
1
|
0
|
1
|
|
November
|
3
|
0
|
0
|
0
|
3
|
|
December
|
3
|
0
|
3
|
0
|
6
|
|
Year 2017
|
Quarter 1
|
January
|
3
|
0
|
0
|
0
|
3
|
|
February
|
1
|
0
|
0
|
0
|
1
|
|
March
|
4
|
0
|
2
|
0
|
6
|
|
Quarter 2
|
April
|
2
|
0
|
0
|
0
|
2
|
|
May
|
9
|
0
|
3
|
0
|
12
|
|
June
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 3
|
July
|
5
|
0
|
4
|
0
|
9
|
|
August
|
2
|
0
|
2
|
0
|
4
|
|
September
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 4
|
October
|
3
|
0
|
3
|
0
|
6
|
|
November
|
1
|
0
|
2
|
0
|
3
|
|
December
|
5
|
0
|
5
|
0
|
10
|
|
Year 2018
|
Quarter 1
|
January
|
9
|
0
|
4
|
0
|
13
|
|
February
|
5
|
0
|
1
|
0
|
6
|
|
March
|
4
|
0
|
4
|
0
|
8
|
|
Quarter 2
|
April
|
6
|
0
|
12
|
0
|
18
|
|
May
|
7
|
0
|
8
|
0
|
15
|
|
June
|
3
|
0
|
6
|
0
|
9
|
|
Quarter 3
|
July
|
2
|
0
|
3
|
0
|
5
|
|
August
|
4
|
0
|
3
|
0
|
7
|
|
September
|
6
|
0
|
6
|
0
|
12
|
|
Quarter 4
|
October
|
6
|
0
|
3
|
0
|
9
|
|
November
|
1
|
0
|
4
|
0
|
5
|
|
December
|
3
|
0
|
1
|
0
|
4
|
|
Year 2019
|
Quarter 1
|
January
|
5
|
0
|
4
|
0
|
9
|
|
February
|
4
|
0
|
3
|
0
|
7
|
|
March
|
1
|
0
|
10
|
0
|
11
|
|
Quarter 2
|
April
|
0
|
0
|
6
|
0
|
6
|
|
May
|
2
|
0
|
3
|
0
|
5
|
|
June
|
0
|
0
|
5
|
0
|
5
|
|
Quarter 3
|
July
|
1
|
0
|
3
|
0
|
4
|
|
August
|
1
|
0
|
4
|
0
|
5
|
|
September
|
3
|
0
|
0
|
0
|
3
|
|
Quarter 4
|
October
|
1
|
0
|
1
|
0
|
2
|
|
November
|
1
|
0
|
5
|
0
|
6
|
|
December
|
1
|
0
|
3
|
0
|
4
|
|
Year 2020
|
Quarter 1
|
January
|
0
|
0
|
2
|
0
|
2
|
|
February
|
2
|
0
|
8
|
0
|
10
|
|
March
|
4
|
0
|
7
|
0
|
11
|
|
Quarter 2
|
April
|
2
|
0
|
0
|
0
|
2
|
|
May
|
1
|
0
|
0
|
0
|
1
|
|
June
|
1
|
0
|
0
|
0
|
1
|
|
Quarter 3
|
July
|
2
|
0
|
0
|
0
|
2
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
13
|
0
|
0
|
0
|
13
|
|
Quarter 4
|
October
|
1
|
0
|
0
|
0
|
1
|
|
November
|
0
|
0
|
5
|
0
|
5
|
|
December
|
1
|
0
|
3
|
0
|
4
|
|
Year 2021
|
Quarter 1
|
January
|
3
|
0
|
2
|
0
|
5
|
|
February
|
1
|
0
|
5
|
0
|
6
|
|
March
|
0
|
0
|
9
|
0
|
9
|
|
Quarter 2
|
April
|
0
|
0
|
4
|
0
|
4
|
|
May
|
0
|
0
|
3
|
0
|
3
|
|
June
|
4
|
0
|
4
|
0
|
8
|
|
Quarter 3
|
July
|
2
|
0
|
4
|
0
|
6
|
|
August
|
0
|
0
|
8
|
0
|
8
|
|
September
|
1
|
0
|
5
|
0
|
6
|
|
Quarter 4
|
October
|
0
|
0
|
6
|
0
|
6
|
|
November
|
1
|
0
|
6
|
0
|
7
|
|
December
|
2
|
0
|
3
|
0
|
5
|
|
Year 2022
|
Quarter 1
|
January
|
3
|
0
|
6
|
0
|
9
|
|
February
|
3
|
0
|
4
|
0
|
7
|
|
March
|
3
|
0
|
3
|
0
|
6
|
|
Quarter 2
|
April
|
0
|
0
|
3
|
0
|
3
|
|
May
|
1
|
0
|
2
|
0
|
3
|
|
June
|
1
|
0
|
1
|
0
|
2
|
|
Quarter 3
|
July
|
4
|
0
|
5
|
0
|
9
|
|
August
|
2
|
0
|
1
|
0
|
3
|
|
September
|
6
|
0
|
1
|
0
|
7
|
|
Quarter 4
|
October
|
1
|
0
|
1
|
0
|
2
|
|
November
|
7
|
0
|
5
|
0
|
12
|
|
December
|
3
|
0
|
5
|
0
|
8
|
|
Year 2023
|
Quarter 1
|
January
|
1
|
0
|
3
|
0
|
4
|
|
February
|
5
|
0
|
3
|
0
|
8
|
|
March
|
6
|
0
|
13
|
0
|
19
|
|
Quarter 2
|
April
|
3
|
0
|
5
|
0
|
8
|
|
May
|
3
|
0
|
5
|
0
|
8
|
|
June
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 3
|
July
|
2
|
0
|
4
|
0
|
6
|
|
August
|
4
|
0
|
8
|
0
|
12
|
|
September
|
1
|
0
|
4
|
0
|
5
|
|
Quarter 4
|
October
|
2
|
0
|
5
|
0
|
7
|
|
November
|
6
|
0
|
6
|
0
|
12
|
|
December
|
3
|
0
|
8
|
0
|
11
|
|
Year 2024
|
Quarter 1
|
January
|
1
|
0
|
3
|
0
|
4
|
|
February
|
1
|
0
|
5
|
0
|
6
|
|
March
|
5
|
0
|
8
|
0
|
13
|
|
Quarter 2
|
April
|
7
|
0
|
15
|
0
|
22
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
506
|
0
|
502
|
0
|
1,008
|
