Панкратьев, Павел Александрович. Исследование свойств плазмы ВЧЕ разряда при селективном травлении нитрида и оксида кремния [Электронный ресурс]: выпускная квалификационная работа магистра: 03.04.02 - Физика ; 03.04.02_05 - Физика плазмы = Study of capacitive rf discharge properties for selective silicon nitride and silicon dioxide etching / П. А. Панкратьев; Санкт-Петербургский политехнический университет Петра Великого, Институт физики, нанотехнологий и телекоммуникаций ; науч. рук. А. С. Смирнов. — Электрон. текстовые дан. (1 файл : 1,3 Мб). — Санкт-Петербург, 2019. — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/vr19-3845.pdf>. — <URL:http://doi.org/10.18720/SPBPU/3/2019/vr/vr19-3845>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-3845-o.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-3845-r.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-3845-a.pdf>.
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2019
|
Quarter 3
|
September
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 4
|
October
|
10
|
0
|
2
|
0
|
12
|
|
November
|
1
|
0
|
1
|
0
|
2
|
|
December
|
1
|
0
|
3
|
0
|
4
|
|
Year 2020
|
Quarter 1
|
January
|
2
|
0
|
0
|
0
|
2
|
|
February
|
1
|
0
|
2
|
0
|
3
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
1
|
0
|
1
|
0
|
2
|
|
Year 2021
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
1
|
0
|
1
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2022
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
1
|
0
|
0
|
0
|
1
|
|
March
|
1
|
0
|
0
|
0
|
1
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
1
|
0
|
0
|
0
|
1
|
|
June
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
21
|
0
|
13
|
0
|
34
|
