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"This comprehensive compendium explores aspects of semiconductor surface characteristics and characterization from the perspective of applied semiconductor device research and process development, rather than an in-depth coverage of surface science related issues. It provides guidance to the features of semiconductor surfaces affecting performance of the practical semiconductor devices, as well as selection of methods used to characterize those features. Based on the author's thirty years of research and teaching in semiconductor surface processing and characterization, this unique reference text addresses the needs of graduate students, researchers, and professionals who are familiar with semiconductor engineering and would like to learn about the practical aspects of semiconductor surface characteristics, processing techniques, and characterization methods used in device process development, process diagnostics and monitoring"--.