Details

Title Handbook of chemical vapor deposition: principles, technology and applications. — 2nd ed.
Creators Pierson Hugh O.
Imprint Amsterdam [etc.]: Elsevier Inc., William Andrew, 1999
Collection Электронные книги зарубежных издательств; Общая коллекция
Subjects Осаждение (хим. ); Пар
UDC 542.65
Document type Other
File type Other
Language English
Rights Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование)
Record key RU\SPSTU\edoc\52644
Record create date 4/24/2018

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Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

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