Design and manufacturing of active microsystems [Электронный ресурс] / ed.: Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. — Berlin, Heidelberg: Springer, 2011. — (Microtechnology and MEMS). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://link.springer.com/book/10.1007/978-3-642-12903-2>.
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
Year 2018
|
Quarter 2
|
0
|
0
|
0
|
23
|
23
|
Quarter 3
|
0
|
0
|
0
|
17
|
17
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
Year 2019
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
0
|
0
|
0
|
69
|
69
|
Quarter 3
|
0
|
0
|
0
|
36
|
36
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
Year 2020
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
0
|
0
|
0
|
2
|
2
|
2021
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
2022
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
Year 2023
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
0
|
0
|
0
|
2
|
2
|
Quarter 3
|
0
|
0
|
0
|
5
|
5
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
Year 2024
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
Quarter 2
|
0
|
0
|
0
|
3
|
3
|
Quarter 3
|
0
|
0
|
0
|
4
|
4
|
Total
|
0
|
0
|
0
|
163
|
163
|