Pierson, Hugh O. Handbook of chemical vapor deposition [Электронный ресурс]: principles, technology and applications / Hugh O. Pierson. — 2nd ed. — Amsterdam [etc.]: Elsevier Inc., William Andrew, 1999. — (Materials science and process technology series). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://www.sciencedirect.com/science/book/9780815514329>.
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2018
|
Quarter 2
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 3
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
Year 2019
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
Year 2020
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
|
Year 2021
|
Quarter 1
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
|
Year 2022
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
|
Year 2023
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 3
|
0
|
0
|
0
|
4
|
4
|
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
|
Year 2024
|
Quarter 1
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 2
|
0
|
0
|
0
|
5
|
5
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
0
|
0
|
0
|
21
|
21
|
