Handbook of silicon based MEMS materials and technologies [Электронный ресурс] / Veikko Lindroos, Markku Tilli, Ari Lehto and Teruaki Motooka. — Amsterdam [etc.]: Elsevier Inc., William Andrew, 2011. — (Micro & Nano Technologies). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://www.sciencedirect.com/science/book/9780815515944>.
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2018
|
Quarter 2
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
2019
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
2020
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
Year 2021
|
Quarter 1
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
3
|
3
|
|
Quarter 4
|
0
|
0
|
0
|
2
|
2
|
|
Year 2022
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 4
|
0
|
0
|
0
|
2
|
2
|
|
Year 2023
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 3
|
0
|
0
|
0
|
4
|
4
|
|
Quarter 4
|
0
|
0
|
0
|
5
|
5
|
|
Year 2024
|
Quarter 1
|
0
|
0
|
0
|
19
|
19
|
|
Quarter 2
|
0
|
0
|
0
|
10
|
10
|
|
Total
|
0
|
0
|
0
|
52
|
52
|
