Handbook of silicon based MEMS materials and technologies [Электронный ресурс] / Veikko Lindroos, Markku Tilli, Ari Lehto and Teruaki Motooka. — Amsterdam [etc.]: Elsevier Inc., William Andrew, 2011. — (Micro & Nano Technologies). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://www.sciencedirect.com/science/book/9780815515944>.
| Period | Read | Copy | Open | Total | ||
|---|---|---|---|---|---|---|
| Year 2018 | Quarter 2 | 0 | 0 | 0 | 1 | 1 |
| Quarter 3 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 4 | 0 | 0 | 0 | 0 | 0 | |
| 2019 | Quarter 1 | 0 | 0 | 0 | 0 | 0 |
| Quarter 2 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 3 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 4 | 0 | 0 | 0 | 0 | 0 | |
| 2020 | Quarter 1 | 0 | 0 | 0 | 0 | 0 |
| Quarter 2 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 3 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 4 | 0 | 0 | 0 | 0 | 0 | |
| Year 2021 | Quarter 1 | 0 | 0 | 0 | 2 | 2 |
| Quarter 2 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 3 | 0 | 0 | 0 | 3 | 3 | |
| Quarter 4 | 0 | 0 | 0 | 2 | 2 | |
| Year 2022 | Quarter 1 | 0 | 0 | 0 | 0 | 0 |
| Quarter 2 | 0 | 0 | 0 | 0 | 0 | |
| Quarter 3 | 0 | 0 | 0 | 2 | 2 | |
| Quarter 4 | 0 | 0 | 0 | 2 | 2 | |
| Year 2023 | Quarter 1 | 0 | 0 | 0 | 0 | 0 |
| Quarter 2 | 0 | 0 | 0 | 2 | 2 | |
| Quarter 3 | 0 | 0 | 0 | 4 | 4 | |
| Quarter 4 | 0 | 0 | 0 | 5 | 5 | |
| Year 2024 | Quarter 1 | 0 | 0 | 0 | 19 | 19 |
| Quarter 2 | 0 | 0 | 0 | 12 | 12 | |
| Quarter 3 | 0 | 0 | 0 | 6 | 6 | |
| Quarter 4 | 0 | 0 | 0 | 9 | 9 | |
| Total | 0 | 0 | 0 | 69 | 69 | |