Физические основы микро- и нанотехнологий: учебное пособие / С. П. Бычков, В. П. Михайлов, Ю. В. Панфилов, Ю. Б. Цветков; под ред. Ю. Б. Цветков; Московский государственный технический университет им. Н.Э. Баумана. — Москва: МГТУ им. Н.Э. Баумана, 2009. — 176 с.: табл., схем. — Доступ по паролю из сети Интернет (чтение). — <URL:https://biblioclub.ru/index.php?page=book&id=344625>. — Текст: электронный
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2021
|
Quarter 4
|
December
|
0
|
0
|
0
|
1
|
1
|
|
Year 2022
|
Quarter 1
|
January
|
0
|
0
|
0
|
1
|
1
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
1
|
1
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2023
|
Quarter 1
|
January
|
0
|
0
|
0
|
1
|
1
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
2
|
2
|
|
May
|
0
|
0
|
0
|
1
|
1
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
3
|
3
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
1
|
1
|
|
November
|
0
|
0
|
0
|
1
|
1
|
|
December
|
0
|
0
|
0
|
1
|
1
|
|
Total
|
0
|
0
|
0
|
14
|
14
|
