Галперин, В. А. Процессы плазменного травления в микро- и нанотехнологиях: учебное пособие / В. А. Галперин, Е. В. Данилкин, А. И. Мочалов. — 3-е изд. — Москва: Лаборатория знаний, 2015. — 286 с. — Доступ по паролю из сети Интернет (чтение). — <URL:https://ibooks.ru/reading.php?short=1&productid=350091>. — <URL:https://ibooks.ru/resize/w188/images/T/978-5-9963-2129-2-01.jpg>. — Текст: электронный
| Period | Read | Copy | Open | Total | |||
|---|---|---|---|---|---|---|---|
| Year 2022 | Quarter 3 | August | 0 | 0 | 0 | 1 | 1 |
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2023 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 1 | 1 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 1 | 1 | ||
| Quarter 4 | October | 0 | 0 | 0 | 1 | 1 | |
| November | 0 | 0 | 0 | 3 | 3 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2024 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 1 | 1 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 3 | 3 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 1 | 1 | ||
| September | 0 | 0 | 0 | 2 | 2 | ||
| Quarter 4 | October | 0 | 0 | 0 | 1 | 1 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| Total | 0 | 0 | 0 | 15 | 15 | ||