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Design and manufacturing of active microsystems [Электронный ресурс] / ed.: Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. — Berlin, Heidelberg: Springer, 2011. — (Microtechnology and MEMS). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://link.springer.com/book/10.1007/978-3-642-12903-2>.

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Period Read Print Copy Open Total
Year 2018 Quarter 2 April 0 0 0 5 5
May 0 0 0 8 8
June 0 0 0 10 10
Quarter 3 July 0 0 0 10 10
August 0 0 0 7 7
September 0 0 0 0 0
Quarter 4 October 0 0 0 1 1
November 0 0 0 0 0
December 0 0 0 0 0
Year 2019 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 25 25
May 0 0 0 22 22
June 0 0 0 22 22
Quarter 3 July 0 0 0 27 27
August 0 0 0 9 9
September 0 0 0 0 0
Quarter 4 October 0 0 0 0 0
November 0 0 0 0 0
December 0 0 0 0 0
Year 2020 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 0 0
May 0 0 0 0 0
June 0 0 0 0 0
Quarter 3 July 0 0 0 0 0
August 0 0 0 0 0
September 0 0 0 0 0
Quarter 4 October 0 0 0 0 0
November 0 0 0 0 0
December 0 0 0 2 2
2021 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 0 0
May 0 0 0 0 0
June 0 0 0 0 0
Quarter 3 July 0 0 0 0 0
August 0 0 0 0 0
September 0 0 0 0 0
Quarter 4 October 0 0 0 0 0
November 0 0 0 0 0
December 0 0 0 0 0
2022 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 0 0
May 0 0 0 0 0
June 0 0 0 0 0
Quarter 3 July 0 0 0 0 0
August 0 0 0 0 0
September 0 0 0 0 0
Quarter 4 October 0 0 0 0 0
November 0 0 0 0 0
December 0 0 0 0 0
Year 2023 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 1 1
May 0 0 0 1 1
June 0 0 0 0 0
Quarter 3 July 0 0 0 0 0
August 0 0 0 2 2
September 0 0 0 3 3
Quarter 4 October 0 0 0 0 0
November 0 0 0 0 0
December 0 0 0 1 1
Year 2024 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 1 1
May 0 0 0 1 1
June 0 0 0 1 1
Quarter 3 July 0 0 0 8 8
August 0 0 0 1 1
September 0 0 0 2 2
Quarter 4 October 0 0 0 0 0
November 0 0 0 0 0
December 0 0 0 0 0
Year 2025 Quarter 1 January 0 0 0 0 0
February 0 0 0 0 0
March 0 0 0 0 0
Quarter 2 April 0 0 0 2 2
May 0 0 0 3 3
June 0 0 0 0 0
Quarter 3 July 0 0 0 5 5
August 0 0 0 7 7
September 0 0 0 4 4
Quarter 4 October 0 0 0 0 0
Total 0 0 0 191 191