Радзиевская, Т. А. Отсекающий УФ-светофильтр для предотвращения отрицательного наклона стенок мастер-штампа мягкой литографии = Cut-off UV light filter to prevent negative slope of the soft lithography hard mold walls / Т. А. Радзиевская, Н. Н. Иванов, С. А. Тарасов. — 1 файл (677 Кб). — (Технологические процессы и маршруты). — DOI 10.24151/1561-5405-2022-27-1-41-49. — Текст: электронный // Известия высших учебных заведений. Электроника = Proceedings of universities. Electronics: научно-технический журнал. – 2022. – С. 41-49. — Загл. с титул. экрана. — Список литературы представлен на русском и английском языках. — Доступ по паролю из сети Интернет (чтение). — <URL:https://www.elibrary.ru/item.asp?id=47983439>.
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