Handbook of silicon based MEMS materials and technologies [Электронный ресурс] / Veikko Lindroos, Markku Tilli, Ari Lehto and Teruaki Motooka. — Amsterdam [etc.]: Elsevier Inc., William Andrew, 2011. — (Micro & Nano Technologies). — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://www.sciencedirect.com/science/book/9780815515944>.
| Period | Read | Copy | Open | Total | |||
|---|---|---|---|---|---|---|---|
| Year 2018 | Quarter 2 | April | 0 | 0 | 0 | 1 | 1 |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| 2019 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| 2020 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2021 | Quarter 1 | January | 0 | 0 | 0 | 1 | 1 |
| February | 0 | 0 | 0 | 1 | 1 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 2 | 2 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 1 | 1 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 1 | 1 | ||
| December | 0 | 0 | 0 | 1 | 1 | ||
| Year 2022 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 2 | 2 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 2 | 2 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2023 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 1 | 1 | |
| May | 0 | 0 | 0 | 1 | 1 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 2 | 2 | ||
| September | 0 | 0 | 0 | 2 | 2 | ||
| Quarter 4 | October | 0 | 0 | 0 | 2 | 2 | |
| November | 0 | 0 | 0 | 2 | 2 | ||
| December | 0 | 0 | 0 | 1 | 1 | ||
| Year 2024 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 5 | 5 | ||
| March | 0 | 0 | 0 | 14 | 14 | ||
| Quarter 2 | April | 0 | 0 | 0 | 6 | 6 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 6 | 6 | ||
| Quarter 3 | July | 0 | 0 | 0 | 1 | 1 | |
| August | 0 | 0 | 0 | 3 | 3 | ||
| September | 0 | 0 | 0 | 2 | 2 | ||
| Quarter 4 | October | 0 | 0 | 0 | 3 | 3 | |
| November | 0 | 0 | 0 | 4 | 4 | ||
| December | 0 | 0 | 0 | 2 | 2 | ||
| Total | 0 | 0 | 0 | 69 | 69 | ||