Adams, Thomas M. Introductory MEMS : fabrication and applications [Электронный ресурс] / Thomas M. Adams, Richard A. Layton. — Boston, MA: Springer, 2010. — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://link.springer.com/book/10.1007/978-0-387-09511-0>.
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2018
|
Quarter 2
|
0
|
0
|
0
|
7
|
7
|
|
Quarter 3
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
|
Year 2019
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
Year 2020
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 3
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
Year 2021
|
Quarter 1
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 4
|
0
|
0
|
0
|
1
|
1
|
|
Year 2022
|
Quarter 1
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 2
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 4
|
0
|
0
|
0
|
0
|
0
|
|
Year 2023
|
Quarter 1
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
0
|
0
|
0
|
2
|
2
|
|
Quarter 3
|
0
|
0
|
0
|
6
|
6
|
|
Quarter 4
|
0
|
0
|
0
|
2
|
2
|
|
Year 2024
|
Quarter 1
|
0
|
0
|
0
|
1
|
1
|
|
Quarter 2
|
0
|
0
|
0
|
2
|
2
|
|
Total
|
0
|
0
|
0
|
32
|
32
|
