Handbook of deposition technologies for films and coatings [Электронный ресурс]: science, applications and technology / ed. by: Peter M. Martin. — 3rd ed. — Amsterdam [etc.]: Elsevier Inc., William Andrew, 2010. — Загл. с титул. экрана. — Электронная версия печатной публикации. — Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:https://www.sciencedirect.com/science/book/9780815520313>.
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2018
|
Quarter 3
|
July
|
0
|
0
|
0
|
2
|
2
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
2019
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
2020
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
2021
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2022
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
1
|
1
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2023
|
Quarter 1
|
January
|
0
|
0
|
0
|
0
|
0
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
1
|
1
|
|
May
|
0
|
0
|
0
|
1
|
1
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
4
|
4
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
1
|
1
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
1
|
1
|
|
Year 2024
|
Quarter 1
|
January
|
0
|
0
|
0
|
1
|
1
|
|
February
|
0
|
0
|
0
|
1
|
1
|
|
March
|
0
|
0
|
0
|
4
|
4
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
1
|
1
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
0
|
0
|
0
|
18
|
18
|
