Формирование прозрачных электропроводящих контактов ITO на гетероструктурах на основе GaAS методом магнетронного напыления [Электронный ресурс] / С.П. Яковлев, В.В. Кораблев, И.П. Сошников и др. — (Секция6 "Технологии системного анализа научных проблем"). — Электрон. текстовые дан. (1 файл : 141Кб) // Материалы...28 февраля - 1 марта 2003 г. [Электронный ресурс] / Санкт-Петербургский государственный политехнический университет; Международная академия наук высшей школы. – Санкт-Петербург, 2003. — Загл. с титул. экрана. — Электрон. версия печ. публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 4.0. — <URL:http://elib.spbstu.ru/dl/003005.pdf>.
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Period
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Read
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Print
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Copy
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Open
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Total
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Year 2012
|
Quarter 2
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April
|
3
|
0
|
2
|
0
|
5
|
|
May
|
1
|
0
|
0
|
0
|
1
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
1
|
0
|
0
|
0
|
1
|
|
August
|
1
|
0
|
0
|
0
|
1
|
|
September
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 4
|
October
|
4
|
0
|
2
|
0
|
6
|
|
November
|
1
|
0
|
0
|
0
|
1
|
|
December
|
1
|
0
|
2
|
0
|
3
|
|
Year 2013
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Quarter 1
|
January
|
1
|
0
|
2
|
0
|
3
|
|
February
|
1
|
0
|
2
|
0
|
3
|
|
March
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 2
|
April
|
4
|
0
|
1
|
0
|
5
|
|
May
|
5
|
0
|
1
|
0
|
6
|
|
June
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 3
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July
|
7
|
0
|
0
|
0
|
7
|
|
August
|
3
|
0
|
3
|
0
|
6
|
|
September
|
3
|
0
|
0
|
0
|
3
|
|
Quarter 4
|
October
|
3
|
0
|
2
|
0
|
5
|
|
November
|
1
|
0
|
1
|
0
|
2
|
|
December
|
2
|
0
|
0
|
0
|
2
|
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Year 2014
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Quarter 1
|
January
|
3
|
0
|
2
|
0
|
5
|
|
February
|
0
|
0
|
1
|
0
|
1
|
|
March
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 2
|
April
|
2
|
0
|
1
|
0
|
3
|
|
May
|
3
|
0
|
2
|
0
|
5
|
|
June
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 3
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July
|
6
|
0
|
6
|
0
|
12
|
|
August
|
1
|
0
|
4
|
0
|
5
|
|
September
|
1
|
0
|
1
|
0
|
2
|
|
Quarter 4
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October
|
3
|
0
|
4
|
0
|
7
|
|
November
|
0
|
0
|
1
|
0
|
1
|
|
December
|
3
|
0
|
3
|
0
|
6
|
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Year 2015
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Quarter 1
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January
|
3
|
0
|
2
|
0
|
5
|
|
February
|
1
|
0
|
3
|
0
|
4
|
|
March
|
1
|
0
|
1
|
0
|
2
|
|
Quarter 2
|
April
|
1
|
0
|
0
|
0
|
1
|
|
May
|
3
|
0
|
2
|
0
|
5
|
|
June
|
5
|
0
|
1
|
0
|
6
|
|
Quarter 3
|
July
|
4
|
0
|
0
|
0
|
4
|
|
August
|
0
|
0
|
4
|
0
|
4
|
|
September
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 4
|
October
|
1
|
0
|
2
|
0
|
3
|
|
November
|
7
|
0
|
5
|
0
|
12
|
|
December
|
7
|
0
|
2
|
0
|
9
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Year 2016
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Quarter 1
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January
|
5
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0
|
2
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0
|
7
|
|
February
|
0
|
0
|
1
|
0
|
1
|
|
March
|
3
|
0
|
1
|
0
|
4
|
|
Quarter 2
|
April
|
4
|
0
|
2
|
0
|
6
|
|
May
|
2
|
0
|
1
|
0
|
3
|
|
June
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 3
|
July
|
1
|
0
|
0
|
0
|
1
|
|
August
|
3
|
0
|
1
|
0
|
4
|
|
September
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 4
|
October
|
2
|
0
|
2
|
0
|
4
|
|
November
|
6
|
0
|
1
|
0
|
7
|
|
December
|
0
|
0
|
2
|
0
|
2
|
|
Year 2017
|
Quarter 1
|
January
|
2
|
0
|
0
|
0
|
2
|
|
February
|
1
|
0
|
0
|
0
|
1
|
|
March
|
4
|
0
|
2
|
0
|
6
|
|
Quarter 2
|
April
|
0
|
0
|
1
|
0
|
1
|
|
May
|
1
|
0
|
1
|
0
|
2
|
|
June
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 3
|
July
|
4
|
0
|
2
|
0
|
6
|
|
August
|
1
|
0
|
4
|
0
|
5
|
|
September
|
1
|
0
|
2
|
0
|
3
|
|
Quarter 4
|
October
|
5
|
0
|
3
|
0
|
8
|
|
November
|
2
|
0
|
2
|
0
|
4
|
|
December
|
2
|
0
|
1
|
0
|
3
|
|
Year 2018
|
Quarter 1
|
January
|
1
|
0
|
4
|
0
|
5
|
|
February
|
6
|
0
|
1
|
0
|
7
|
|
March
|
5
|
0
|
1
|
0
|
6
|
|
Quarter 2
|
April
|
3
|
0
|
0
|
0
|
3
|
|
May
|
1
|
0
|
1
|
0
|
2
|
|
June
|
3
|
0
|
3
|
0
|
6
|
|
Quarter 3
|
July
|
3
|
0
|
0
|
0
|
3
|
|
August
|
3
|
0
|
2
|
0
|
5
|
|
September
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 4
|
October
|
2
|
0
|
6
|
0
|
8
|
|
November
|
2
|
0
|
1
|
0
|
3
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Year 2019
|
Quarter 1
|
January
|
4
|
0
|
2
|
0
|
6
|
|
February
|
2
|
0
|
2
|
0
|
4
|
|
March
|
0
|
0
|
8
|
0
|
8
|
|
Quarter 2
|
April
|
2
|
0
|
1
|
0
|
3
|
|
May
|
2
|
0
|
1
|
0
|
3
|
|
June
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 3
|
July
|
0
|
0
|
6
|
0
|
6
|
|
August
|
1
|
0
|
0
|
0
|
1
|
|
September
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 4
|
October
|
0
|
0
|
2
|
0
|
2
|
|
November
|
1
|
0
|
0
|
0
|
1
|
|
December
|
0
|
0
|
4
|
0
|
4
|
|
Year 2020
|
Quarter 1
|
January
|
5
|
0
|
2
|
0
|
7
|
|
February
|
1
|
0
|
2
|
0
|
3
|
|
March
|
6
|
0
|
6
|
0
|
12
|
|
Quarter 2
|
April
|
1
|
0
|
0
|
0
|
1
|
|
May
|
2
|
0
|
0
|
0
|
2
|
|
June
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 3
|
July
|
3
|
0
|
0
|
0
|
3
|
|
August
|
3
|
0
|
0
|
0
|
3
|
|
September
|
4
|
0
|
0
|
0
|
4
|
|
Quarter 4
|
October
|
3
|
0
|
0
|
0
|
3
|
|
November
|
4
|
0
|
8
|
0
|
12
|
|
December
|
4
|
0
|
1
|
0
|
5
|
|
Year 2021
|
Quarter 1
|
January
|
4
|
0
|
2
|
0
|
6
|
|
February
|
6
|
0
|
1
|
0
|
7
|
|
March
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 2
|
April
|
1
|
0
|
2
|
0
|
3
|
|
May
|
4
|
0
|
2
|
0
|
6
|
|
June
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 3
|
July
|
7
|
0
|
4
|
0
|
11
|
|
August
|
1
|
0
|
1
|
0
|
2
|
|
September
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 4
|
October
|
0
|
0
|
5
|
0
|
5
|
|
November
|
5
|
0
|
2
|
0
|
7
|
|
December
|
2
|
0
|
2
|
0
|
4
|
|
Year 2022
|
Quarter 1
|
January
|
2
|
0
|
1
|
0
|
3
|
|
February
|
1
|
0
|
5
|
0
|
6
|
|
March
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 2
|
April
|
3
|
0
|
5
|
0
|
8
|
|
May
|
2
|
0
|
1
|
0
|
3
|
|
June
|
2
|
0
|
4
|
0
|
6
|
|
Quarter 3
|
July
|
3
|
0
|
1
|
0
|
4
|
|
August
|
4
|
0
|
0
|
0
|
4
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
1
|
0
|
2
|
0
|
3
|
|
November
|
9
|
0
|
2
|
0
|
11
|
|
December
|
15
|
0
|
1
|
0
|
16
|
|
Year 2023
|
Quarter 1
|
January
|
10
|
0
|
2
|
0
|
12
|
|
February
|
3
|
0
|
3
|
0
|
6
|
|
March
|
2
|
0
|
3
|
0
|
5
|
|
Quarter 2
|
April
|
3
|
0
|
1
|
0
|
4
|
|
May
|
2
|
0
|
1
|
0
|
3
|
|
June
|
4
|
0
|
0
|
0
|
4
|
|
Quarter 3
|
July
|
2
|
0
|
1
|
0
|
3
|
|
August
|
1
|
0
|
1
|
0
|
2
|
|
September
|
0
|
0
|
5
|
0
|
5
|
|
Quarter 4
|
October
|
3
|
0
|
4
|
0
|
7
|
|
November
|
6
|
0
|
6
|
0
|
12
|
|
December
|
1
|
0
|
0
|
0
|
1
|
|
Total
|
355
|
0
|
248
|
0
|
603
|
