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В данной работе проводилось изучение методов сварки пластин, а именно процесса анодного бондинга. Разработана концепция установки анодного бондинга. Проведено математическое моделирование тепломассопереноса в системе: нагревательный элемент – электрод – кремний – стекло – электрод. Определены условия осуществления процесса сварки пластин боросиликатного стекла и кремния. Создан прототип установки анодного бондинга. Проведена апробация установки, осуществлена анодная сварка кремния со стеклом.
In this work, we studied the methods of welding a plate, namely the process of anode bonding. The concept of installing anode bonding has been developed. Mathematical modeling of heat and mass transfer in the system was carried out: heating element - electrode - silicon - glass - electrode. Conditions for the production of plastic borosilicate glass and nitrogen. A prototype installation of anode bonding. The installation was tested, anodic welding of nitrogen with glass was carried out.
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