Details

Title: Introductory MEMS : fabrication and applications
Creators: Adams Thomas M.; Layton Richard A.
Imprint: Boston, MA: Springer, 2010
Collection: Электронные книги зарубежных издательств; Общая коллекция
Subjects: Микроэлектронные схемы интегральные — Производство; Датчики; Полупроводники; sensors; integrated circuit; mechanics; semiconductors; microelectromechanical system (MEMS)
UDC: 621.382.049.77; 681.586; 537.311.322
Document type: Other
File type: Other
Language: English
Rights: Доступ из локальной сети ФБ СПбПУ (чтение, печать, копирование)
Record key: RU\SPSTU\edoc\52581

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Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

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