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Горелов, В.А. Проблема фоторезиста для нанолитографии [Электронный ресурс] / В.А. Горелов, Р.П. Сейсян. — (Секция "Твердотельная электроника"). — Электрон. текстовые дан. (1 файл : 77,6 Кб) // XXXIV неделя науки СПбГПУ: материалы Всероссийской межвузовской научно-технической конференции студентов и аспирантов: 28 ноября - 3 декабря 2005 г. / Санкт-Петербургский государственный политехнический университет, Совет по научно-исследовательской работе студентов; [под общ. ред. А. И. Рудского, В. В. Глухова]. – СПб. – 2006. – Физико-механический факультет; Физико-технический факультет; Факультет медицинской физики и биоинженерии. — Загл. с титул. экрана. — Электрон. версия печ. публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Текстовый файл. — Adobe Acrobat Reader 4.0. — <URL:http://elib.spbstu.ru/dl/007013.pdf>.

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Period Read Print Copy Open Total
Year 2012 Quarter 1 March 2 0 2 0 4
Quarter 2 April 3 0 1 0 4
May 1 0 0 0 1
June 1 0 0 0 1
Quarter 3 July 0 0 1 0 1
August 1 0 1 0 2
September 2 0 2 0 4
Quarter 4 October 4 0 2 0 6
November 0 0 1 0 1
December 0 0 1 0 1
Year 2013 Quarter 1 January 3 0 1 0 4
February 1 0 2 0 3
March 0 0 0 0 0
Quarter 2 April 4 0 1 0 5
May 5 0 1 0 6
June 4 0 0 0 4
Quarter 3 July 3 0 0 0 3
August 8 0 3 0 11
September 5 0 0 0 5
Quarter 4 October 2 0 0 0 2
November 4 0 2 0 6
December 2 0 1 0 3
Year 2014 Quarter 1 January 1 0 0 0 1
February 1 0 0 0 1
March 1 0 1 0 2
Quarter 2 April 0 0 0 0 0
May 2 0 0 0 2
June 5 0 2 0 7
Quarter 3 July 4 0 1 0 5
August 4 0 1 0 5
September 2 0 0 0 2
Quarter 4 October 1 0 3 0 4
November 2 0 0 0 2
December 2 0 0 0 2
Year 2015 Quarter 1 January 3 0 0 0 3
February 3 0 0 0 3
March 1 0 1 0 2
Quarter 2 April 1 0 0 0 1
May 2 0 2 0 4
June 1 0 1 0 2
Quarter 3 July 3 0 1 0 4
August 1 0 0 0 1
September 1 0 3 0 4
Quarter 4 October 4 0 1 0 5
November 6 0 4 0 10
December 0 0 8 0 8
Year 2016 Quarter 1 January 1 0 2 0 3
February 2 0 4 0 6
March 1 0 2 0 3
Quarter 2 April 3 0 7 0 10
May 2 0 1 0 3
June 2 0 0 0 2
Quarter 3 July 1 0 0 0 1
August 2 0 0 0 2
September 4 0 1 0 5
Quarter 4 October 1 0 2 0 3
November 2 0 2 0 4
December 2 0 2 0 4
Year 2017 Quarter 1 January 1 0 0 0 1
February 0 0 0 0 0
March 3 0 1 0 4
Quarter 2 April 1 0 1 0 2
May 4 0 2 0 6
June 2 0 4 0 6
Quarter 3 July 3 0 2 0 5
August 4 0 2 0 6
September 2 0 4 0 6
Quarter 4 October 2 0 2 0 4
November 2 0 1 0 3
December 3 0 2 0 5
Year 2018 Quarter 1 January 1 0 5 0 6
February 2 0 1 0 3
March 3 0 5 0 8
Quarter 2 April 2 0 3 0 5
May 0 0 2 0 2
June 2 0 4 0 6
Quarter 3 July 3 0 1 0 4
August 13 0 3 0 16
September 2 0 3 0 5
Quarter 4 October 1 0 2 0 3
November 1 0 4 0 5
December 3 0 0 0 3
Year 2019 Quarter 1 January 1 0 2 0 3
February 1 0 1 0 2
March 4 0 2 0 6
Quarter 2 April 2 0 3 0 5
May 1 0 1 0 2
June 1 0 2 0 3
Quarter 3 July 1 0 2 0 3
August 0 0 2 0 2
September 2 0 0 0 2
Quarter 4 October 1 0 0 0 1
November 0 0 2 0 2
December 1 0 3 0 4
Year 2020 Quarter 1 January 0 0 1 0 1
February 0 0 5 0 5
March 6 0 5 0 11
Quarter 2 April 1 0 0 0 1
May 2 0 0 0 2
June 2 0 0 0 2
Quarter 3 July 0 0 0 0 0
August 1 0 0 0 1
September 6 0 0 0 6
Quarter 4 October 3 0 0 0 3
November 4 0 6 0 10
December 5 0 2 0 7
Year 2021 Quarter 1 January 1 0 5 0 6
February 2 0 4 0 6
March 1 0 4 0 5
Quarter 2 April 1 0 2 0 3
May 3 0 7 0 10
June 2 0 8 0 10
Quarter 3 July 1 0 1 0 2
August 6 0 5 0 11
September 2 0 4 0 6
Quarter 4 October 1 0 4 0 5
November 1 0 4 0 5
December 2 0 5 0 7
Year 2022 Quarter 1 January 4 0 0 0 4
Total 261 0 220 0 481