Алябьев, Алексей Юрьевич. Применение технологии атомно-слоевого осаждения оксида гафния в производстве элементов электронной компонентной базы = Atomic layer deposition technology for electronic components production [Электронный ресурс] / А. Ю. Алябьев. — Электрон. текстовые дан. (1 файл : 403 Кб) // Научно-технические ведомости Санкт-Петербургского государственного политехнического университета. Сер.: Информатика. Телекоммуникации. Управление = St. Petersburg state polytechnical university journal. Computer science. Telecommunications and control systems: научное издание. – Санкт-Петербург. – 2015. – Загл. с титул. экрана. — Электронная версия печатной публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Текстовый файл. — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/2/8699.pdf>. — <URL:http://doi.org/10.5862/JCSTCS.224.5>.
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Period
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Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2016
|
Quarter 1
|
January
|
11
|
0
|
3
|
0
|
14
|
|
February
|
21
|
0
|
19
|
0
|
40
|
|
March
|
5
|
0
|
7
|
0
|
12
|
|
Quarter 2
|
April
|
8
|
0
|
15
|
0
|
23
|
|
May
|
4
|
0
|
4
|
0
|
8
|
|
June
|
3
|
0
|
3
|
0
|
6
|
|
Quarter 3
|
July
|
2
|
0
|
0
|
0
|
2
|
|
August
|
3
|
0
|
6
|
0
|
9
|
|
September
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 4
|
October
|
5
|
0
|
2
|
0
|
7
|
|
November
|
2
|
0
|
1
|
0
|
3
|
|
December
|
3
|
0
|
2
|
0
|
5
|
|
Year 2017
|
Quarter 1
|
January
|
1
|
0
|
2
|
0
|
3
|
|
February
|
1
|
0
|
0
|
0
|
1
|
|
March
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 2
|
April
|
0
|
0
|
0
|
0
|
0
|
|
May
|
2
|
0
|
5
|
0
|
7
|
|
June
|
3
|
0
|
5
|
0
|
8
|
|
Quarter 3
|
July
|
5
|
0
|
9
|
0
|
14
|
|
August
|
1
|
0
|
21
|
0
|
22
|
|
September
|
2
|
0
|
15
|
0
|
17
|
|
Quarter 4
|
October
|
4
|
0
|
13
|
0
|
17
|
|
November
|
6
|
0
|
16
|
0
|
22
|
|
December
|
2
|
0
|
17
|
0
|
19
|
|
Year 2018
|
Quarter 1
|
January
|
3
|
0
|
29
|
0
|
32
|
|
February
|
1
|
0
|
21
|
0
|
22
|
|
March
|
1
|
0
|
20
|
0
|
21
|
|
Quarter 2
|
April
|
3
|
0
|
19
|
0
|
22
|
|
May
|
3
|
0
|
15
|
0
|
18
|
|
June
|
1
|
0
|
34
|
0
|
35
|
|
Quarter 3
|
July
|
3
|
0
|
13
|
0
|
16
|
|
August
|
5
|
0
|
12
|
0
|
17
|
|
September
|
2
|
0
|
10
|
0
|
12
|
|
Quarter 4
|
October
|
0
|
0
|
9
|
0
|
9
|
|
November
|
1
|
0
|
15
|
0
|
16
|
|
December
|
3
|
0
|
12
|
0
|
15
|
|
Year 2019
|
Quarter 1
|
January
|
1
|
0
|
6
|
0
|
7
|
|
February
|
0
|
0
|
5
|
0
|
5
|
|
March
|
1
|
0
|
6
|
0
|
7
|
|
Quarter 2
|
April
|
1
|
0
|
22
|
0
|
23
|
|
May
|
2
|
0
|
22
|
0
|
24
|
|
June
|
2
|
2
|
18
|
0
|
22
|
|
Quarter 3
|
July
|
0
|
0
|
20
|
0
|
20
|
|
August
|
1
|
0
|
9
|
0
|
10
|
|
September
|
1
|
0
|
5
|
0
|
6
|
|
Quarter 4
|
October
|
0
|
0
|
5
|
0
|
5
|
|
November
|
0
|
0
|
10
|
0
|
10
|
|
December
|
1
|
0
|
19
|
0
|
20
|
|
Year 2020
|
Quarter 1
|
January
|
0
|
0
|
9
|
0
|
9
|
|
February
|
2
|
0
|
12
|
0
|
14
|
|
March
|
9
|
0
|
13
|
0
|
22
|
|
Quarter 2
|
April
|
8
|
0
|
0
|
0
|
8
|
|
May
|
2
|
0
|
2
|
0
|
4
|
|
June
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 3
|
July
|
6
|
0
|
0
|
0
|
6
|
|
August
|
2
|
0
|
0
|
0
|
2
|
|
September
|
5
|
0
|
0
|
0
|
5
|
|
Quarter 4
|
October
|
2
|
0
|
0
|
0
|
2
|
|
November
|
5
|
0
|
6
|
0
|
11
|
|
December
|
2
|
0
|
11
|
0
|
13
|
|
Year 2021
|
Quarter 1
|
January
|
4
|
0
|
4
|
0
|
8
|
|
February
|
1
|
0
|
2
|
0
|
3
|
|
March
|
0
|
0
|
1
|
0
|
1
|
|
Quarter 2
|
April
|
0
|
0
|
3
|
0
|
3
|
|
May
|
1
|
0
|
1
|
0
|
2
|
|
June
|
8
|
0
|
4
|
0
|
12
|
|
Quarter 3
|
July
|
2
|
0
|
3
|
0
|
5
|
|
August
|
5
|
0
|
6
|
0
|
11
|
|
September
|
3
|
0
|
3
|
0
|
6
|
|
Quarter 4
|
October
|
2
|
0
|
6
|
0
|
8
|
|
November
|
1
|
0
|
1
|
0
|
2
|
|
December
|
2
|
0
|
7
|
0
|
9
|
|
Year 2022
|
Quarter 1
|
January
|
2
|
0
|
3
|
0
|
5
|
|
February
|
9
|
0
|
12
|
0
|
21
|
|
March
|
1
|
0
|
7
|
0
|
8
|
|
Quarter 2
|
April
|
3
|
0
|
12
|
0
|
15
|
|
May
|
0
|
0
|
4
|
0
|
4
|
|
June
|
1
|
0
|
5
|
0
|
6
|
|
Quarter 3
|
July
|
4
|
0
|
4
|
0
|
8
|
|
August
|
2
|
0
|
3
|
0
|
5
|
|
September
|
4
|
0
|
4
|
0
|
8
|
|
Quarter 4
|
October
|
1
|
0
|
4
|
0
|
5
|
|
November
|
6
|
0
|
4
|
0
|
10
|
|
December
|
7
|
0
|
7
|
0
|
14
|
|
Year 2023
|
Quarter 1
|
January
|
1
|
0
|
5
|
0
|
6
|
|
February
|
2
|
0
|
4
|
0
|
6
|
|
March
|
0
|
0
|
9
|
0
|
9
|
|
Quarter 2
|
April
|
0
|
0
|
6
|
0
|
6
|
|
May
|
4
|
0
|
17
|
0
|
21
|
|
June
|
0
|
0
|
3
|
0
|
3
|
|
Quarter 3
|
July
|
4
|
0
|
3
|
0
|
7
|
|
August
|
3
|
0
|
3
|
0
|
6
|
|
September
|
2
|
0
|
3
|
0
|
5
|
|
Quarter 4
|
October
|
2
|
0
|
4
|
0
|
6
|
|
November
|
3
|
0
|
4
|
0
|
7
|
|
December
|
0
|
0
|
9
|
0
|
9
|
|
Year 2024
|
Quarter 1
|
January
|
0
|
0
|
2
|
0
|
2
|
|
February
|
4
|
0
|
5
|
0
|
9
|
|
March
|
1
|
0
|
8
|
0
|
9
|
|
Quarter 2
|
April
|
5
|
0
|
26
|
0
|
31
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
280
|
2
|
799
|
0
|
1,081
|
