Алиева, Александра Игоревна. Оптимизация параметров Bosch-процесса для получения микромеханических структур по технологии кремний на стекле [Электронный ресурс]: выпускная квалификационная работа магистра: 22.04.01 - Материаловедение и технологии материалов ; 22.04.01_01 - Материаловедение наноматериалов и компонентов электронной техники = Optimization of Bosch-process parameters for silicon on glass micromechanical systems / А. И. Алиева; Санкт-Петербургский политехнический университет Петра Великого, Институт металлургии, машиностроения и транспорта ; науч. рук. М. В. Мишин. — Электрон. текстовые дан. (1 файл : 5,7 Мб). — Санкт-Петербург, 2019. — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/vr19-1069.pdf>. — <URL:http://doi.org/10.18720/SPBPU/3/2019/vr/vr19-1069>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-1069-o.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-1069-r.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-1069-a.pdf>.
| Period | Read | Copy | Open | Total | |||
|---|---|---|---|---|---|---|---|
| Year 2019 | Quarter 3 | September | 8 | 0 | 8 | 0 | 16 |
| Quarter 4 | October | 3 | 0 | 1 | 0 | 4 | |
| November | 2 | 0 | 8 | 0 | 10 | ||
| December | 0 | 0 | 3 | 0 | 3 | ||
| Year 2020 | Quarter 1 | January | 0 | 0 | 4 | 0 | 4 |
| February | 1 | 0 | 6 | 0 | 7 | ||
| March | 6 | 0 | 7 | 0 | 13 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2021 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 1 | 0 | 1 | |
| May | 2 | 0 | 3 | 0 | 5 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2022 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 2 | 0 | 2 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Total | 22 | 0 | 43 | 0 | 65 | ||