Буторин, Павел Сергеевич. Оптимизация Xe лазерно - плазменного источника EUV излучения для литографии. Новый метод подавления периферического поглощения [Электронный ресурс]: выпускная квалификационная работа магистра: 03.04.02 - Физика ; 03.04.02_05 - Физика плазмы = Optimization of Xe LPP source of EUV radiation for lithography. New method of suppressing peripheral absorption / П. С. Буторин; Санкт-Петербургский политехнический университет Петра Великого, Институт физики, нанотехнологий и телекоммуникаций ; науч. рук. В. Ю. Сергеев. — Электрон. текстовые дан. (1 файл : 2,6 Мб). — Санкт-Петербург, 2019. — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/vr19-3839.pdf>. — <URL:http://doi.org/10.18720/SPBPU/3/2019/vr/vr19-3839>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-3839-o.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-3839-r.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2019/vr/rev/vr19-3839-a.pdf>.
| Period | Read | Copy | Open | Total | |||
|---|---|---|---|---|---|---|---|
| Year 2019 | Quarter 3 | September | 2 | 0 | 2 | 0 | 4 |
| Quarter 4 | October | 6 | 0 | 3 | 0 | 9 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 2 | 0 | 2 | 0 | 4 | ||
| Year 2020 | Quarter 1 | January | 0 | 0 | 1 | 0 | 1 |
| February | 0 | 0 | 2 | 0 | 2 | ||
| March | 2 | 0 | 0 | 0 | 2 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 1 | 0 | 1 | 0 | 2 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2021 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
| May | 1 | 0 | 0 | 0 | 1 | ||
| June | 2 | 0 | 0 | 0 | 2 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 1 | 0 | 0 | 0 | 1 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2022 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 0 | 0 | 0 | 0 | 0 | ||
| March | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 2 | April | 1 | 0 | 0 | 0 | 1 | |
| May | 0 | 0 | 0 | 0 | 0 | ||
| June | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Total | 18 | 0 | 11 | 0 | 29 | ||