Саламатова, Ульяна Вячеславовна. Создание маски для заземляющих отверстий с помощью процесса фотолитографии на обратной стороне подложки GaAs с использованием установки MJB4: выпускная квалификационная работа бакалавра: направление 28.03.01 «Нанотехнологии и микросистемная техника» ; образовательная программа 28.03.01_01 «Технологии материалов и изделий микросистемной техники» = Creating a mask for ground holes using the photolithography process on the back of a GaAs substrate using the MJB4 installation / У. В. Саламатова; Санкт-Петербургский политехнический университет Петра Великого, Институт машиностроения, материалов и транспорта; научный руководитель Г. А. Михайловский; консультант по нормоконтролю Л. А. Филатов. — Санкт-Петербург, 2020. — 1 файл (1,7 Мб). — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/3/2020/vr/vr20-1436.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2020/vr/rev/vr20-1436-o.pdf>. — <URL:http://elib.spbstu.ru/dl/3/2020/vr/rev/vr20-1436-a.pdf>. — DOI 10.18720/SPBPU/3/2020/vr/vr20-1436. — Текст
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Year 2021 | Quarter 1 | February | 0 | 0 | 1 | 0 | 1 |
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Quarter 2 | April | 0 | 0 | 1 | 0 | 1 | |
May | 0 | 0 | 2 | 0 | 2 | ||
June | 0 | 0 | 1 | 0 | 1 | ||
Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
August | 0 | 0 | 0 | 0 | 0 | ||
September | 1 | 0 | 0 | 0 | 1 | ||
Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
November | 1 | 0 | 0 | 0 | 1 | ||
December | 0 | 0 | 0 | 0 | 0 | ||
2022 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
February | 0 | 0 | 0 | 0 | 0 | ||
March | 0 | 0 | 0 | 0 | 0 | ||
Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
May | 0 | 0 | 0 | 0 | 0 | ||
June | 0 | 0 | 0 | 0 | 0 | ||
Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
August | 0 | 0 | 0 | 0 | 0 | ||
September | 0 | 0 | 0 | 0 | 0 | ||
Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
November | 0 | 0 | 0 | 0 | 0 | ||
December | 0 | 0 | 0 | 0 | 0 | ||
2023 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
February | 0 | 0 | 0 | 0 | 0 | ||
March | 0 | 0 | 0 | 0 | 0 | ||
Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
May | 0 | 0 | 0 | 0 | 0 | ||
June | 0 | 0 | 0 | 0 | 0 | ||
Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
August | 0 | 0 | 0 | 0 | 0 | ||
September | 0 | 0 | 0 | 0 | 0 | ||
Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
November | 0 | 0 | 0 | 0 | 0 | ||
December | 0 | 0 | 0 | 0 | 0 | ||
Year 2024 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
February | 1 | 0 | 0 | 0 | 1 | ||
March | 0 | 0 | 0 | 0 | 0 | ||
Quarter 2 | April | 0 | 0 | 0 | 0 | 0 | |
May | 0 | 0 | 0 | 0 | 0 | ||
June | 0 | 0 | 0 | 0 | 0 | ||
Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
August | 0 | 0 | 0 | 0 | 0 | ||
September | 0 | 0 | 0 | 0 | 0 | ||
Quarter 4 | October | 2 | 0 | 0 | 0 | 2 | |
Total | 5 | 0 | 5 | 0 | 10 |