Зуфаров, Вадим Марсельевич. Диэлектрические свойства PECVD пленок нитрида кремния [Электронный ресурс]: бакалаврская работа / В. М. Зуфаров; Санкт-Петербургский политехнический университет Петра Великого, Институт физики, нанотехнологий и телекоммуникаций, Физической электроники. — Электрон. текстовые дан. (1 файл : 1,77 МБ). — Санкт-Петербург, 2015. — Загл. с титул. экрана. — Доступ по паролю из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/2/6912.pdf>.
|
Period
|
Read
|
Print
|
Copy
|
Open
|
Total
|
|
Year 2015
|
Quarter 3
|
September
|
7
|
0
|
6
|
0
|
13
|
|
Quarter 4
|
October
|
5
|
0
|
8
|
0
|
13
|
|
November
|
13
|
0
|
11
|
0
|
24
|
|
December
|
12
|
0
|
12
|
0
|
24
|
|
Year 2016
|
Quarter 1
|
January
|
10
|
0
|
5
|
0
|
15
|
|
February
|
2
|
0
|
7
|
0
|
9
|
|
March
|
5
|
0
|
3
|
0
|
8
|
|
Quarter 2
|
April
|
1
|
0
|
4
|
0
|
5
|
|
May
|
2
|
0
|
6
|
0
|
8
|
|
June
|
5
|
0
|
2
|
0
|
7
|
|
Quarter 3
|
July
|
3
|
0
|
0
|
0
|
3
|
|
August
|
4
|
0
|
4
|
0
|
8
|
|
September
|
1
|
0
|
2
|
0
|
3
|
|
Quarter 4
|
October
|
5
|
0
|
3
|
0
|
8
|
|
November
|
2
|
0
|
2
|
0
|
4
|
|
December
|
2
|
0
|
7
|
0
|
9
|
|
Year 2017
|
Quarter 1
|
January
|
2
|
0
|
4
|
0
|
6
|
|
February
|
0
|
0
|
1
|
0
|
1
|
|
March
|
3
|
0
|
9
|
0
|
12
|
|
Quarter 2
|
April
|
1
|
0
|
10
|
0
|
11
|
|
May
|
2
|
0
|
34
|
0
|
36
|
|
June
|
0
|
0
|
49
|
0
|
49
|
|
Quarter 3
|
July
|
5
|
0
|
25
|
0
|
30
|
|
August
|
3
|
0
|
48
|
0
|
51
|
|
September
|
3
|
0
|
35
|
0
|
38
|
|
Quarter 4
|
October
|
3
|
0
|
27
|
0
|
30
|
|
November
|
3
|
0
|
58
|
0
|
61
|
|
December
|
2
|
0
|
49
|
0
|
51
|
|
Year 2018
|
Quarter 1
|
January
|
0
|
0
|
43
|
0
|
43
|
|
February
|
3
|
0
|
35
|
0
|
38
|
|
March
|
1
|
0
|
27
|
0
|
28
|
|
Quarter 2
|
April
|
5
|
0
|
37
|
0
|
42
|
|
May
|
3
|
0
|
34
|
0
|
37
|
|
June
|
4
|
0
|
64
|
0
|
68
|
|
Quarter 3
|
July
|
0
|
0
|
98
|
0
|
98
|
|
August
|
5
|
0
|
89
|
0
|
94
|
|
September
|
8
|
0
|
37
|
0
|
45
|
|
Quarter 4
|
October
|
4
|
0
|
44
|
0
|
48
|
|
November
|
0
|
0
|
27
|
0
|
27
|
|
December
|
1
|
0
|
31
|
0
|
32
|
|
Year 2019
|
Quarter 1
|
January
|
3
|
0
|
19
|
0
|
22
|
|
February
|
1
|
0
|
35
|
0
|
36
|
|
March
|
3
|
0
|
42
|
0
|
45
|
|
Quarter 2
|
April
|
0
|
0
|
48
|
0
|
48
|
|
May
|
3
|
0
|
56
|
0
|
59
|
|
June
|
1
|
0
|
56
|
0
|
57
|
|
Quarter 3
|
July
|
1
|
0
|
33
|
0
|
34
|
|
August
|
0
|
0
|
26
|
0
|
26
|
|
September
|
2
|
0
|
31
|
0
|
33
|
|
Quarter 4
|
October
|
0
|
0
|
35
|
0
|
35
|
|
November
|
0
|
0
|
44
|
0
|
44
|
|
December
|
0
|
0
|
65
|
0
|
65
|
|
Year 2020
|
Quarter 1
|
January
|
1
|
0
|
21
|
0
|
22
|
|
February
|
0
|
0
|
27
|
0
|
27
|
|
March
|
6
|
0
|
13
|
0
|
19
|
|
Quarter 2
|
April
|
3
|
0
|
0
|
0
|
3
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 3
|
July
|
0
|
0
|
0
|
0
|
0
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 4
|
October
|
0
|
0
|
0
|
0
|
0
|
|
November
|
0
|
0
|
0
|
0
|
0
|
|
December
|
0
|
0
|
0
|
0
|
0
|
|
Total
|
166
|
0
|
1,548
|
0
|
1,714
|
