Ледяев, О.Ю. Влияние условий роста на свойства эпитаксиальных слоев AlN, выращенных на подложках SiC методом хлоридно-гидридной эпитаксии [Электронный ресурс] / О.Ю. Ледяев, В.Г. Сидоров, А.Е. Николаев. — (Секция "Физика полупроводников и наноэлектроника"). — Электрон. текстовые дан. (1 файл :113 Кб) // Материалы...26 ноября - 1 декабря 2001 года [Электронный ресурс] / Совет СПбГТУ по научно-исследовательской работе студентов; Под общ. ред. В.В. Глухова. – Санкт-Петербург. – 2002. – Радиофизический факультет [Электронный ресурс]. — Загл. с титул. экрана. — Электрон. версия печ. публикации. — Свободный доступ из сети Интернет (чтение, печать, копирование). — Adobe Acrobat Reader 4.0. — <URL:http://elib.spbstu.ru/dl/001520.pdf>.
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Period
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Read
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Print
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Copy
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Open
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Total
|
|
Year 2012
|
Quarter 1
|
March
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 2
|
April
|
3
|
0
|
1
|
0
|
4
|
|
May
|
0
|
0
|
0
|
0
|
0
|
|
June
|
1
|
0
|
2
|
0
|
3
|
|
Quarter 3
|
July
|
2
|
0
|
0
|
0
|
2
|
|
August
|
1
|
0
|
1
|
0
|
2
|
|
September
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 4
|
October
|
1
|
0
|
2
|
0
|
3
|
|
November
|
5
|
0
|
4
|
0
|
9
|
|
December
|
1
|
0
|
0
|
0
|
1
|
|
Year 2013
|
Quarter 1
|
January
|
1
|
0
|
2
|
0
|
3
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
0
|
0
|
2
|
0
|
2
|
|
Quarter 2
|
April
|
2
|
0
|
1
|
0
|
3
|
|
May
|
4
|
0
|
0
|
0
|
4
|
|
June
|
4
|
0
|
2
|
0
|
6
|
|
Quarter 3
|
July
|
8
|
0
|
5
|
0
|
13
|
|
August
|
5
|
0
|
2
|
0
|
7
|
|
September
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 4
|
October
|
2
|
0
|
1
|
0
|
3
|
|
November
|
5
|
0
|
1
|
0
|
6
|
|
December
|
7
|
0
|
3
|
0
|
10
|
|
Year 2014
|
Quarter 1
|
January
|
8
|
0
|
2
|
0
|
10
|
|
February
|
5
|
0
|
5
|
0
|
10
|
|
March
|
8
|
0
|
3
|
0
|
11
|
|
Quarter 2
|
April
|
8
|
0
|
1
|
0
|
9
|
|
May
|
11
|
0
|
5
|
0
|
16
|
|
June
|
7
|
0
|
0
|
0
|
7
|
|
Quarter 3
|
July
|
7
|
0
|
4
|
0
|
11
|
|
August
|
4
|
0
|
0
|
0
|
4
|
|
September
|
4
|
0
|
1
|
0
|
5
|
|
Quarter 4
|
October
|
5
|
0
|
2
|
0
|
7
|
|
November
|
4
|
0
|
2
|
0
|
6
|
|
December
|
6
|
0
|
1
|
0
|
7
|
|
Year 2015
|
Quarter 1
|
January
|
3
|
0
|
0
|
0
|
3
|
|
February
|
5
|
0
|
2
|
0
|
7
|
|
March
|
4
|
0
|
3
|
0
|
7
|
|
Quarter 2
|
April
|
8
|
0
|
1
|
0
|
9
|
|
May
|
10
|
0
|
9
|
0
|
19
|
|
June
|
9
|
0
|
10
|
0
|
19
|
|
Quarter 3
|
July
|
7
|
0
|
5
|
0
|
12
|
|
August
|
1
|
0
|
6
|
0
|
7
|
|
September
|
6
|
0
|
5
|
0
|
11
|
|
Quarter 4
|
October
|
5
|
0
|
4
|
0
|
9
|
|
November
|
8
|
0
|
5
|
0
|
13
|
|
December
|
3
|
0
|
1
|
0
|
4
|
|
Year 2016
|
Quarter 1
|
January
|
4
|
0
|
2
|
0
|
6
|
|
February
|
8
|
0
|
4
|
0
|
12
|
|
March
|
11
|
0
|
2
|
0
|
13
|
|
Quarter 2
|
April
|
3
|
0
|
5
|
0
|
8
|
|
May
|
3
|
0
|
0
|
0
|
3
|
|
June
|
3
|
0
|
2
|
0
|
5
|
|
Quarter 3
|
July
|
5
|
0
|
0
|
0
|
5
|
|
August
|
2
|
0
|
3
|
0
|
5
|
|
September
|
6
|
0
|
1
|
0
|
7
|
|
Quarter 4
|
October
|
7
|
0
|
4
|
0
|
11
|
|
November
|
3
|
0
|
2
|
0
|
5
|
|
December
|
2
|
0
|
3
|
0
|
5
|
|
Year 2017
|
Quarter 1
|
January
|
2
|
0
|
0
|
0
|
2
|
|
February
|
0
|
0
|
0
|
0
|
0
|
|
March
|
6
|
0
|
3
|
0
|
9
|
|
Quarter 2
|
April
|
1
|
0
|
3
|
0
|
4
|
|
May
|
0
|
0
|
5
|
0
|
5
|
|
June
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 3
|
July
|
3
|
0
|
3
|
0
|
6
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
3
|
0
|
4
|
0
|
7
|
|
Quarter 4
|
October
|
2
|
0
|
4
|
0
|
6
|
|
November
|
4
|
0
|
5
|
0
|
9
|
|
December
|
5
|
0
|
4
|
0
|
9
|
|
Year 2018
|
Quarter 1
|
January
|
1
|
0
|
1
|
0
|
2
|
|
February
|
4
|
0
|
3
|
0
|
7
|
|
March
|
1
|
0
|
4
|
0
|
5
|
|
Quarter 2
|
April
|
0
|
0
|
6
|
0
|
6
|
|
May
|
1
|
0
|
8
|
0
|
9
|
|
June
|
3
|
0
|
7
|
0
|
10
|
|
Quarter 3
|
July
|
2
|
0
|
2
|
0
|
4
|
|
August
|
0
|
0
|
12
|
0
|
12
|
|
September
|
2
|
0
|
10
|
0
|
12
|
|
Quarter 4
|
October
|
3
|
0
|
3
|
0
|
6
|
|
November
|
4
|
0
|
2
|
0
|
6
|
|
December
|
1
|
0
|
2
|
0
|
3
|
|
Year 2019
|
Quarter 1
|
January
|
2
|
0
|
4
|
0
|
6
|
|
February
|
1
|
0
|
3
|
0
|
4
|
|
March
|
0
|
0
|
19
|
0
|
19
|
|
Quarter 2
|
April
|
0
|
0
|
9
|
0
|
9
|
|
May
|
2
|
0
|
1
|
0
|
3
|
|
June
|
2
|
0
|
3
|
0
|
5
|
|
Quarter 3
|
July
|
1
|
0
|
5
|
0
|
6
|
|
August
|
0
|
0
|
0
|
0
|
0
|
|
September
|
0
|
0
|
0
|
0
|
0
|
|
Quarter 4
|
October
|
0
|
0
|
1
|
0
|
1
|
|
November
|
2
|
0
|
0
|
0
|
2
|
|
December
|
1
|
0
|
2
|
0
|
3
|
|
Year 2020
|
Quarter 1
|
January
|
0
|
0
|
3
|
0
|
3
|
|
February
|
0
|
0
|
4
|
0
|
4
|
|
March
|
2
|
0
|
7
|
0
|
9
|
|
Quarter 2
|
April
|
2
|
0
|
0
|
0
|
2
|
|
May
|
3
|
0
|
0
|
0
|
3
|
|
June
|
1
|
0
|
0
|
0
|
1
|
|
Quarter 3
|
July
|
2
|
0
|
0
|
0
|
2
|
|
August
|
2
|
0
|
0
|
0
|
2
|
|
September
|
5
|
0
|
0
|
0
|
5
|
|
Quarter 4
|
October
|
5
|
0
|
1
|
0
|
6
|
|
November
|
3
|
0
|
6
|
0
|
9
|
|
December
|
1
|
0
|
3
|
0
|
4
|
|
Year 2021
|
Quarter 1
|
January
|
5
|
0
|
6
|
0
|
11
|
|
February
|
4
|
0
|
2
|
0
|
6
|
|
March
|
2
|
0
|
1
|
0
|
3
|
|
Quarter 2
|
April
|
1
|
0
|
2
|
0
|
3
|
|
May
|
3
|
0
|
2
|
0
|
5
|
|
June
|
4
|
0
|
5
|
0
|
9
|
|
Quarter 3
|
July
|
1
|
0
|
1
|
0
|
2
|
|
August
|
2
|
0
|
1
|
0
|
3
|
|
September
|
2
|
0
|
4
|
0
|
6
|
|
Quarter 4
|
October
|
2
|
0
|
4
|
0
|
6
|
|
November
|
1
|
0
|
2
|
0
|
3
|
|
December
|
2
|
0
|
2
|
0
|
4
|
|
Year 2022
|
Quarter 1
|
January
|
2
|
0
|
5
|
0
|
7
|
|
February
|
3
|
0
|
3
|
0
|
6
|
|
March
|
2
|
0
|
0
|
0
|
2
|
|
Quarter 2
|
April
|
3
|
0
|
3
|
0
|
6
|
|
May
|
5
|
0
|
2
|
0
|
7
|
|
June
|
3
|
0
|
4
|
0
|
7
|
|
Quarter 3
|
July
|
5
|
0
|
1
|
0
|
6
|
|
August
|
10
|
0
|
1
|
0
|
11
|
|
September
|
0
|
0
|
2
|
0
|
2
|
|
Quarter 4
|
October
|
5
|
0
|
1
|
0
|
6
|
|
November
|
7
|
0
|
4
|
0
|
11
|
|
December
|
9
|
0
|
3
|
0
|
12
|
|
Year 2023
|
Quarter 1
|
January
|
9
|
0
|
1
|
0
|
10
|
|
February
|
1
|
0
|
3
|
0
|
4
|
|
March
|
2
|
0
|
2
|
0
|
4
|
|
Quarter 2
|
April
|
3
|
0
|
1
|
0
|
4
|
|
May
|
6
|
0
|
6
|
0
|
12
|
|
June
|
3
|
0
|
1
|
0
|
4
|
|
Quarter 3
|
July
|
2
|
0
|
2
|
0
|
4
|
|
August
|
3
|
0
|
3
|
0
|
6
|
|
September
|
1
|
0
|
3
|
0
|
4
|
|
Quarter 4
|
October
|
3
|
0
|
4
|
0
|
7
|
|
November
|
5
|
0
|
5
|
0
|
10
|
|
December
|
9
|
0
|
2
|
0
|
11
|
|
Year 2024
|
Quarter 1
|
January
|
1
|
0
|
0
|
0
|
1
|
|
February
|
1
|
0
|
5
|
0
|
6
|
|
March
|
4
|
0
|
2
|
0
|
6
|
|
Quarter 2
|
April
|
4
|
0
|
2
|
0
|
6
|
|
Total
|
488
|
0
|
404
|
0
|
892
|
