Вакуумная техника для производства микро- и наноэлектроники [Электронный ресурс]: учебное пособие / [М. В. Мишин, А. В. Архипов, П. Г. Габдуллин, О. Е. Квашенкина]; Санкт-Петербургский политехнический университет Петра Великого. — Электрон. текстовые дан. (1 файл : 8,06 Мб). — Санкт-Петербург: ПОЛИТЕХ-ПРЕСС, 2019. — Загл. с титул. экрана. — Электронная копия печатной публикации 2019 г. — Доступ по паролю из сети Интернет (чтение, печать). — Adobe Acrobat Reader 7.0. — <URL:http://elib.spbstu.ru/dl/2/i19-225.pdf>. — <URL:http://doi.org/10.18720/SPBPU/2/i19-225>.
| Period | Read | Copy | Open | Total | |||
|---|---|---|---|---|---|---|---|
| Year 2019 | Quarter 3 | August | 1 | 0 | 0 | 0 | 1 |
| September | 4 | 0 | 0 | 0 | 4 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 0 | 0 | 0 | 0 | 0 | ||
| December | 1 | 0 | 0 | 0 | 1 | ||
| Year 2020 | Quarter 1 | January | 1 | 0 | 0 | 0 | 1 |
| February | 3 | 0 | 0 | 0 | 3 | ||
| March | 3 | 0 | 0 | 0 | 3 | ||
| Quarter 2 | April | 12 | 0 | 0 | 0 | 12 | |
| May | 32 | 1 | 0 | 0 | 33 | ||
| June | 28 | 2 | 0 | 0 | 30 | ||
| Quarter 3 | July | 13 | 1 | 0 | 0 | 14 | |
| August | 11 | 0 | 0 | 0 | 11 | ||
| September | 16 | 0 | 0 | 0 | 16 | ||
| Quarter 4 | October | 7 | 0 | 0 | 0 | 7 | |
| November | 2 | 0 | 0 | 0 | 2 | ||
| December | 2 | 0 | 0 | 0 | 2 | ||
| Year 2021 | Quarter 1 | January | 4 | 1 | 0 | 0 | 5 |
| February | 5 | 0 | 0 | 0 | 5 | ||
| March | 6 | 2 | 0 | 0 | 8 | ||
| Quarter 2 | April | 7 | 3 | 0 | 0 | 10 | |
| May | 17 | 0 | 0 | 0 | 17 | ||
| June | 1 | 0 | 0 | 0 | 1 | ||
| Quarter 3 | July | 1 | 0 | 0 | 0 | 1 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 1 | 0 | 0 | 0 | 1 | ||
| Quarter 4 | October | 1 | 0 | 0 | 0 | 1 | |
| November | 1 | 0 | 0 | 0 | 1 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2022 | Quarter 1 | January | 0 | 0 | 0 | 0 | 0 |
| February | 3 | 0 | 0 | 0 | 3 | ||
| March | 6 | 0 | 0 | 0 | 6 | ||
| Quarter 2 | April | 2 | 1 | 0 | 0 | 3 | |
| May | 26 | 1 | 0 | 0 | 27 | ||
| June | 1 | 0 | 0 | 0 | 1 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 7 | 0 | 0 | 0 | 7 | |
| November | 2 | 0 | 0 | 0 | 2 | ||
| December | 0 | 0 | 0 | 0 | 0 | ||
| Year 2023 | Quarter 1 | January | 3 | 0 | 0 | 0 | 3 |
| February | 4 | 2 | 0 | 0 | 6 | ||
| March | 4 | 0 | 0 | 0 | 4 | ||
| Quarter 2 | April | 12 | 0 | 0 | 0 | 12 | |
| May | 24 | 1 | 0 | 0 | 25 | ||
| June | 1 | 0 | 0 | 0 | 1 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Quarter 4 | October | 0 | 0 | 0 | 0 | 0 | |
| November | 2 | 1 | 0 | 0 | 3 | ||
| December | 1 | 1 | 0 | 0 | 2 | ||
| Year 2024 | Quarter 1 | January | 1 | 0 | 0 | 0 | 1 |
| February | 5 | 0 | 0 | 0 | 5 | ||
| March | 12 | 1 | 0 | 0 | 13 | ||
| Quarter 2 | April | 28 | 3 | 0 | 0 | 31 | |
| May | 44 | 0 | 0 | 0 | 44 | ||
| June | 48 | 3 | 0 | 0 | 51 | ||
| Quarter 3 | July | 0 | 0 | 0 | 0 | 0 | |
| August | 0 | 0 | 0 | 0 | 0 | ||
| September | 0 | 0 | 0 | 0 | 0 | ||
| Total | 416 | 24 | 0 | 0 | 440 | ||